3D MAGNETIC MICROACTUATOR MADE OF NEWLY DEVELOPED MAGNETICALLY MODIFIED PHOTOCURABLE POLYMER AND APPLICATION TO SWIMMING MICROMACHINE AND MICROSCREWPUMP

被引：25

作者：

Kobayashi, Kengo ^{[1
]}

Ikuta, Koji ^{[1
]}

机构：

[1] Nagoya Univ, Dept Micronano Syst Engn, Nagoya, Aichi 4648601, Japan

来源：

IEEE 22ND INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2009) | 2009年

关键词：

MICRO-STEREOLITHOGRAPHY;

D O I：

10.1109/MEMSYS.2009.4805306

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper describes a newly developed photocurable polymer with ferromagnetic property for microstereolithography to fabricate magnetic microactuators with three dimensional (3D) structures and its application to a wirelessly controllable swimming micromachine and microscrewpump. This polymer was prepared by mixing a photocurable polymer with magnetic particles, together a viscosity-increasing agent to maintain the particle dispersion. It was demonstrated that this polymer were rapidly fabricated into various complicated 3D magnetic microstructures using microstereolithography. Finally, a swimming micromachine and microscrewpump driven by magnetic force wirelessly were developed using screw-type microactuators made of the polymer with a diameter of submillimeter order.

引用

页码：11 / 14

页数：4

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