Hydrogen incorporation in amorphous GexSe100-x films prepared by plasma-enhanced chemical vapour deposition

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作者
Nagels, P [1 ]
Mertens, R [1 ]
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[1] Univ Antwerp, RUCA, B-2020 Antwerp, Belgium
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关键词
amorphous GexSe100-x; hydrogen incorporation; infrared and Raman spectroscopy;
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T [工业技术];
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08 ;
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页码:81 / 84
页数:4
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