Fluid simulation of the E-H mode transition in inductively coupled plasma

被引：45

作者：

Zhao, Shu-Xia ^{[1
]}

Xu, Xiang ^{[1
]}

Li, Xue-Chun ^{[1
]}

Wang, You-Nian ^{[1
]}

机构：

[1] Dalian Univ Technol, Sch Phys & Optoelect Technol, Dalian 116024, Peoples R China

来源：

JOURNAL OF APPLIED PHYSICS | 2009年 / 105卷 / 08期

基金：

中国国家自然科学基金;

关键词：

discharges (electric); plasma density; plasma instability; plasma simulation; plasma temperature; PLANAR COIL; DISCHARGE; INSTABILITIES; HYSTERESIS; POWER;

D O I：

10.1063/1.3112009

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

One self-consistent method combined with the electromagnetic theory and fluid model is developed to investigate the E-H mode transition of argon inductively coupled plasma (ICP) by adjusting the external electric parameters of the reactor. ICP dynamic characteristics of radial and axial space are also studied when E and H modes coexist. By regulating the radio-frequency current in the coil and voltage across the powered end of the coil and the ground, the E-H mode transition is observed, accompanied by the substantial variations in the electromagnetic field and plasma parameters (density, temperature, and deposited power). Besides, the evolution characteristics of ICP are examined when the discharge mechanism transforms from an E-mode dominated to an H-mode dominated.

引用

页数：10

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