One self-consistent method combined with the electromagnetic theory and fluid model is developed to investigate the E-H mode transition of argon inductively coupled plasma (ICP) by adjusting the external electric parameters of the reactor. ICP dynamic characteristics of radial and axial space are also studied when E and H modes coexist. By regulating the radio-frequency current in the coil and voltage across the powered end of the coil and the ground, the E-H mode transition is observed, accompanied by the substantial variations in the electromagnetic field and plasma parameters (density, temperature, and deposited power). Besides, the evolution characteristics of ICP are examined when the discharge mechanism transforms from an E-mode dominated to an H-mode dominated.
机构:
Hanyang Univ, Dept Elect Engn, 222 Wangsimni Ro, Seoul 133791, South KoreaHanyang Univ, Dept Elect Engn, 222 Wangsimni Ro, Seoul 133791, South Korea
Park, Il-Seo
Kim, Kyung-Hyun
论文数: 0引用数: 0
h-index: 0
机构:
Hanyang Univ, Dept Elect Engn, 222 Wangsimni Ro, Seoul 133791, South KoreaHanyang Univ, Dept Elect Engn, 222 Wangsimni Ro, Seoul 133791, South Korea
Kim, Kyung-Hyun
Kim, Tae-Woo
论文数: 0引用数: 0
h-index: 0
机构:
Hanyang Univ, Dept Elect Engn, 222 Wangsimni Ro, Seoul 133791, South KoreaHanyang Univ, Dept Elect Engn, 222 Wangsimni Ro, Seoul 133791, South Korea
Kim, Tae-Woo
Kim, Kwan-Youg
论文数: 0引用数: 0
h-index: 0
机构:
Hanyang Univ, Dept Elect Engn, 222 Wangsimni Ro, Seoul 133791, South KoreaHanyang Univ, Dept Elect Engn, 222 Wangsimni Ro, Seoul 133791, South Korea
Kim, Kwan-Youg
Moon, Ho-Jun
论文数: 0引用数: 0
h-index: 0
机构:
Hanyang Univ, Dept Elect Engn, 222 Wangsimni Ro, Seoul 133791, South KoreaHanyang Univ, Dept Elect Engn, 222 Wangsimni Ro, Seoul 133791, South Korea
Moon, Ho-Jun
Chung, Chin-Wook
论文数: 0引用数: 0
h-index: 0
机构:
Hanyang Univ, Dept Elect Engn, 222 Wangsimni Ro, Seoul 133791, South KoreaHanyang Univ, Dept Elect Engn, 222 Wangsimni Ro, Seoul 133791, South Korea
机构:
Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education),School of Physics and Optoelectronic Technology, Dalian University of TechnologyKey Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education),School of Physics and Optoelectronic Technology, Dalian University of Technology
赵书霞
高飞
论文数: 0引用数: 0
h-index: 0
机构:
Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education),School of Physics and Optoelectronic Technology, Dalian University of TechnologyKey Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education),School of Physics and Optoelectronic Technology, Dalian University of Technology
高飞
张钰如
论文数: 0引用数: 0
h-index: 0
机构:
Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education),School of Physics and Optoelectronic Technology, Dalian University of TechnologyKey Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education),School of Physics and Optoelectronic Technology, Dalian University of Technology
张钰如
论文数: 引用数:
h-index:
机构:
李雪春
王友年
论文数: 0引用数: 0
h-index: 0
机构:
Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education),School of Physics and Optoelectronic Technology, Dalian University of TechnologyKey Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education),School of Physics and Optoelectronic Technology, Dalian University of Technology
机构:
Univ Sci & Technol China, Dept Modern Phys, Key Lab Basic Plasma Phys, Chinese Acad Sci, Anhua 230026, Peoples R ChinaUniv Sci & Technol China, Dept Modern Phys, Key Lab Basic Plasma Phys, Chinese Acad Sci, Anhua 230026, Peoples R China
Du Yin-Chang
Cao Jin-Xiang
论文数: 0引用数: 0
h-index: 0
机构:
Univ Sci & Technol China, Dept Modern Phys, Key Lab Basic Plasma Phys, Chinese Acad Sci, Anhua 230026, Peoples R ChinaUniv Sci & Technol China, Dept Modern Phys, Key Lab Basic Plasma Phys, Chinese Acad Sci, Anhua 230026, Peoples R China
Cao Jin-Xiang
Wang Jian
论文数: 0引用数: 0
h-index: 0
机构:
Univ Sci & Technol China, Dept Modern Phys, Key Lab Basic Plasma Phys, Chinese Acad Sci, Anhua 230026, Peoples R ChinaUniv Sci & Technol China, Dept Modern Phys, Key Lab Basic Plasma Phys, Chinese Acad Sci, Anhua 230026, Peoples R China
Wang Jian
Zheng Zhe
论文数: 0引用数: 0
h-index: 0
机构:
Univ Sci & Technol China, Dept Modern Phys, Key Lab Basic Plasma Phys, Chinese Acad Sci, Anhua 230026, Peoples R ChinaUniv Sci & Technol China, Dept Modern Phys, Key Lab Basic Plasma Phys, Chinese Acad Sci, Anhua 230026, Peoples R China
Zheng Zhe
Liu Yu
论文数: 0引用数: 0
h-index: 0
机构:
Univ Sci & Technol China, Dept Modern Phys, Key Lab Basic Plasma Phys, Chinese Acad Sci, Anhua 230026, Peoples R ChinaUniv Sci & Technol China, Dept Modern Phys, Key Lab Basic Plasma Phys, Chinese Acad Sci, Anhua 230026, Peoples R China
Liu Yu
Meng Guang
论文数: 0引用数: 0
h-index: 0
机构:
Test Phys & Numer Math Lab, Beijing 100076, Peoples R ChinaUniv Sci & Technol China, Dept Modern Phys, Key Lab Basic Plasma Phys, Chinese Acad Sci, Anhua 230026, Peoples R China
Meng Guang
Ren Ai-Min
论文数: 0引用数: 0
h-index: 0
机构:
Test Phys & Numer Math Lab, Beijing 100076, Peoples R ChinaUniv Sci & Technol China, Dept Modern Phys, Key Lab Basic Plasma Phys, Chinese Acad Sci, Anhua 230026, Peoples R China
Ren Ai-Min
Zhang Sheng-Jun
论文数: 0引用数: 0
h-index: 0
机构:
Test Phys & Numer Math Lab, Beijing 100076, Peoples R ChinaUniv Sci & Technol China, Dept Modern Phys, Key Lab Basic Plasma Phys, Chinese Acad Sci, Anhua 230026, Peoples R China
机构:
Zhongyuan Univ Technol, Henan Prov Key Lab Funct Text Mat, Collaborat Innovat Ctr Text & Garment Ind, Zhengzhou 450007, Henan, Peoples R ChinaZhongyuan Univ Technol, Henan Prov Key Lab Funct Text Mat, Collaborat Innovat Ctr Text & Garment Ind, Zhengzhou 450007, Henan, Peoples R China
Sun, Xiao-Yan
Zhang, Yu-Ru
论文数: 0引用数: 0
h-index: 0
机构:
Dalian Univ Technol, Key Lab Mat Modificat Laser Ion & Electron Beams, Minist Educ, Sch Phys, Dalian 116024, Peoples R ChinaZhongyuan Univ Technol, Henan Prov Key Lab Funct Text Mat, Collaborat Innovat Ctr Text & Garment Ind, Zhengzhou 450007, Henan, Peoples R China
Zhang, Yu-Ru
Chai, Sen
论文数: 0引用数: 0
h-index: 0
机构:
China Special Equipment Inspect & Res Inst, Beijing 100000, Peoples R ChinaZhongyuan Univ Technol, Henan Prov Key Lab Funct Text Mat, Collaborat Innovat Ctr Text & Garment Ind, Zhengzhou 450007, Henan, Peoples R China
Chai, Sen
Wang, You-Nian
论文数: 0引用数: 0
h-index: 0
机构:
Dalian Univ Technol, Key Lab Mat Modificat Laser Ion & Electron Beams, Minist Educ, Sch Phys, Dalian 116024, Peoples R ChinaZhongyuan Univ Technol, Henan Prov Key Lab Funct Text Mat, Collaborat Innovat Ctr Text & Garment Ind, Zhengzhou 450007, Henan, Peoples R China
Wang, You-Nian
He, Jian-Xin
论文数: 0引用数: 0
h-index: 0
机构:
Zhongyuan Univ Technol, Henan Prov Key Lab Funct Text Mat, Collaborat Innovat Ctr Text & Garment Ind, Zhengzhou 450007, Henan, Peoples R ChinaZhongyuan Univ Technol, Henan Prov Key Lab Funct Text Mat, Collaborat Innovat Ctr Text & Garment Ind, Zhengzhou 450007, Henan, Peoples R China
机构:
Hanyang Univ, Dept Elect Engn, 222 Wangsimni Ro, Seoul 133791, South KoreaHanyang Univ, Dept Elect Engn, 222 Wangsimni Ro, Seoul 133791, South Korea
Park, Il-Seo
Kim, Kyung-Hyun
论文数: 0引用数: 0
h-index: 0
机构:
Hanyang Univ, Dept Elect Engn, 222 Wangsimni Ro, Seoul 133791, South KoreaHanyang Univ, Dept Elect Engn, 222 Wangsimni Ro, Seoul 133791, South Korea
Kim, Kyung-Hyun
Kim, Tae-Woo
论文数: 0引用数: 0
h-index: 0
机构:
Hanyang Univ, Dept Elect Engn, 222 Wangsimni Ro, Seoul 133791, South KoreaHanyang Univ, Dept Elect Engn, 222 Wangsimni Ro, Seoul 133791, South Korea
Kim, Tae-Woo
Kim, Kwan-Youg
论文数: 0引用数: 0
h-index: 0
机构:
Hanyang Univ, Dept Elect Engn, 222 Wangsimni Ro, Seoul 133791, South KoreaHanyang Univ, Dept Elect Engn, 222 Wangsimni Ro, Seoul 133791, South Korea
Kim, Kwan-Youg
Moon, Ho-Jun
论文数: 0引用数: 0
h-index: 0
机构:
Hanyang Univ, Dept Elect Engn, 222 Wangsimni Ro, Seoul 133791, South KoreaHanyang Univ, Dept Elect Engn, 222 Wangsimni Ro, Seoul 133791, South Korea
Moon, Ho-Jun
Chung, Chin-Wook
论文数: 0引用数: 0
h-index: 0
机构:
Hanyang Univ, Dept Elect Engn, 222 Wangsimni Ro, Seoul 133791, South KoreaHanyang Univ, Dept Elect Engn, 222 Wangsimni Ro, Seoul 133791, South Korea
机构:
Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education),School of Physics and Optoelectronic Technology, Dalian University of TechnologyKey Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education),School of Physics and Optoelectronic Technology, Dalian University of Technology
赵书霞
高飞
论文数: 0引用数: 0
h-index: 0
机构:
Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education),School of Physics and Optoelectronic Technology, Dalian University of TechnologyKey Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education),School of Physics and Optoelectronic Technology, Dalian University of Technology
高飞
张钰如
论文数: 0引用数: 0
h-index: 0
机构:
Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education),School of Physics and Optoelectronic Technology, Dalian University of TechnologyKey Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education),School of Physics and Optoelectronic Technology, Dalian University of Technology
张钰如
论文数: 引用数:
h-index:
机构:
李雪春
王友年
论文数: 0引用数: 0
h-index: 0
机构:
Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education),School of Physics and Optoelectronic Technology, Dalian University of TechnologyKey Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education),School of Physics and Optoelectronic Technology, Dalian University of Technology
机构:
Univ Sci & Technol China, Dept Modern Phys, Key Lab Basic Plasma Phys, Chinese Acad Sci, Anhua 230026, Peoples R ChinaUniv Sci & Technol China, Dept Modern Phys, Key Lab Basic Plasma Phys, Chinese Acad Sci, Anhua 230026, Peoples R China
Du Yin-Chang
Cao Jin-Xiang
论文数: 0引用数: 0
h-index: 0
机构:
Univ Sci & Technol China, Dept Modern Phys, Key Lab Basic Plasma Phys, Chinese Acad Sci, Anhua 230026, Peoples R ChinaUniv Sci & Technol China, Dept Modern Phys, Key Lab Basic Plasma Phys, Chinese Acad Sci, Anhua 230026, Peoples R China
Cao Jin-Xiang
Wang Jian
论文数: 0引用数: 0
h-index: 0
机构:
Univ Sci & Technol China, Dept Modern Phys, Key Lab Basic Plasma Phys, Chinese Acad Sci, Anhua 230026, Peoples R ChinaUniv Sci & Technol China, Dept Modern Phys, Key Lab Basic Plasma Phys, Chinese Acad Sci, Anhua 230026, Peoples R China
Wang Jian
Zheng Zhe
论文数: 0引用数: 0
h-index: 0
机构:
Univ Sci & Technol China, Dept Modern Phys, Key Lab Basic Plasma Phys, Chinese Acad Sci, Anhua 230026, Peoples R ChinaUniv Sci & Technol China, Dept Modern Phys, Key Lab Basic Plasma Phys, Chinese Acad Sci, Anhua 230026, Peoples R China
Zheng Zhe
Liu Yu
论文数: 0引用数: 0
h-index: 0
机构:
Univ Sci & Technol China, Dept Modern Phys, Key Lab Basic Plasma Phys, Chinese Acad Sci, Anhua 230026, Peoples R ChinaUniv Sci & Technol China, Dept Modern Phys, Key Lab Basic Plasma Phys, Chinese Acad Sci, Anhua 230026, Peoples R China
Liu Yu
Meng Guang
论文数: 0引用数: 0
h-index: 0
机构:
Test Phys & Numer Math Lab, Beijing 100076, Peoples R ChinaUniv Sci & Technol China, Dept Modern Phys, Key Lab Basic Plasma Phys, Chinese Acad Sci, Anhua 230026, Peoples R China
Meng Guang
Ren Ai-Min
论文数: 0引用数: 0
h-index: 0
机构:
Test Phys & Numer Math Lab, Beijing 100076, Peoples R ChinaUniv Sci & Technol China, Dept Modern Phys, Key Lab Basic Plasma Phys, Chinese Acad Sci, Anhua 230026, Peoples R China
Ren Ai-Min
Zhang Sheng-Jun
论文数: 0引用数: 0
h-index: 0
机构:
Test Phys & Numer Math Lab, Beijing 100076, Peoples R ChinaUniv Sci & Technol China, Dept Modern Phys, Key Lab Basic Plasma Phys, Chinese Acad Sci, Anhua 230026, Peoples R China
机构:
Zhongyuan Univ Technol, Henan Prov Key Lab Funct Text Mat, Collaborat Innovat Ctr Text & Garment Ind, Zhengzhou 450007, Henan, Peoples R ChinaZhongyuan Univ Technol, Henan Prov Key Lab Funct Text Mat, Collaborat Innovat Ctr Text & Garment Ind, Zhengzhou 450007, Henan, Peoples R China
Sun, Xiao-Yan
Zhang, Yu-Ru
论文数: 0引用数: 0
h-index: 0
机构:
Dalian Univ Technol, Key Lab Mat Modificat Laser Ion & Electron Beams, Minist Educ, Sch Phys, Dalian 116024, Peoples R ChinaZhongyuan Univ Technol, Henan Prov Key Lab Funct Text Mat, Collaborat Innovat Ctr Text & Garment Ind, Zhengzhou 450007, Henan, Peoples R China
Zhang, Yu-Ru
Chai, Sen
论文数: 0引用数: 0
h-index: 0
机构:
China Special Equipment Inspect & Res Inst, Beijing 100000, Peoples R ChinaZhongyuan Univ Technol, Henan Prov Key Lab Funct Text Mat, Collaborat Innovat Ctr Text & Garment Ind, Zhengzhou 450007, Henan, Peoples R China
Chai, Sen
Wang, You-Nian
论文数: 0引用数: 0
h-index: 0
机构:
Dalian Univ Technol, Key Lab Mat Modificat Laser Ion & Electron Beams, Minist Educ, Sch Phys, Dalian 116024, Peoples R ChinaZhongyuan Univ Technol, Henan Prov Key Lab Funct Text Mat, Collaborat Innovat Ctr Text & Garment Ind, Zhengzhou 450007, Henan, Peoples R China
Wang, You-Nian
He, Jian-Xin
论文数: 0引用数: 0
h-index: 0
机构:
Zhongyuan Univ Technol, Henan Prov Key Lab Funct Text Mat, Collaborat Innovat Ctr Text & Garment Ind, Zhengzhou 450007, Henan, Peoples R ChinaZhongyuan Univ Technol, Henan Prov Key Lab Funct Text Mat, Collaborat Innovat Ctr Text & Garment Ind, Zhengzhou 450007, Henan, Peoples R China