One self-consistent method combined with the electromagnetic theory and fluid model is developed to investigate the E-H mode transition of argon inductively coupled plasma (ICP) by adjusting the external electric parameters of the reactor. ICP dynamic characteristics of radial and axial space are also studied when E and H modes coexist. By regulating the radio-frequency current in the coil and voltage across the powered end of the coil and the ground, the E-H mode transition is observed, accompanied by the substantial variations in the electromagnetic field and plasma parameters (density, temperature, and deposited power). Besides, the evolution characteristics of ICP are examined when the discharge mechanism transforms from an E-mode dominated to an H-mode dominated.
机构:
Dalian Univ Technol, Sch Phys, Key Lab Mat Modificat Laser Ion & Electron Beams, Minist Educ, Dalian 116024, Peoples R ChinaDalian Univ Technol, Sch Phys, Key Lab Mat Modificat Laser Ion & Electron Beams, Minist Educ, Dalian 116024, Peoples R China
Zhao, Ming-Liang
Tong, Lei
论文数: 0引用数: 0
h-index: 0
机构:
Dalian Univ Technol, Sch Phys, Key Lab Mat Modificat Laser Ion & Electron Beams, Minist Educ, Dalian 116024, Peoples R ChinaDalian Univ Technol, Sch Phys, Key Lab Mat Modificat Laser Ion & Electron Beams, Minist Educ, Dalian 116024, Peoples R China
Tong, Lei
Zhang, Yu-Ru
论文数: 0引用数: 0
h-index: 0
机构:
Dalian Univ Technol, Sch Phys, Key Lab Mat Modificat Laser Ion & Electron Beams, Minist Educ, Dalian 116024, Peoples R ChinaDalian Univ Technol, Sch Phys, Key Lab Mat Modificat Laser Ion & Electron Beams, Minist Educ, Dalian 116024, Peoples R China
Zhang, Yu-Ru
Gao, Fei
论文数: 0引用数: 0
h-index: 0
机构:
Dalian Univ Technol, Sch Phys, Key Lab Mat Modificat Laser Ion & Electron Beams, Minist Educ, Dalian 116024, Peoples R ChinaDalian Univ Technol, Sch Phys, Key Lab Mat Modificat Laser Ion & Electron Beams, Minist Educ, Dalian 116024, Peoples R China
Gao, Fei
Wang, You-Nian
论文数: 0引用数: 0
h-index: 0
机构:
Dalian Univ Technol, Sch Phys, Key Lab Mat Modificat Laser Ion & Electron Beams, Minist Educ, Dalian 116024, Peoples R ChinaDalian Univ Technol, Sch Phys, Key Lab Mat Modificat Laser Ion & Electron Beams, Minist Educ, Dalian 116024, Peoples R China
机构:
Dalian Univ Technol, Sch Phys, Key Lab Mat Modificat Laser Ion & Electron Beams, Dalian 116024, Peoples R ChinaDalian Univ Technol, Sch Phys, Key Lab Mat Modificat Laser Ion & Electron Beams, Dalian 116024, Peoples R China
Wang, Xin-Jie
Lyu, Xiang-Yun
论文数: 0引用数: 0
h-index: 0
机构:
Dalian Univ Technol, Sch Phys, Key Lab Mat Modificat Laser Ion & Electron Beams, Dalian 116024, Peoples R ChinaDalian Univ Technol, Sch Phys, Key Lab Mat Modificat Laser Ion & Electron Beams, Dalian 116024, Peoples R China
Lyu, Xiang-Yun
Gong, Li-Yue
论文数: 0引用数: 0
h-index: 0
机构:
Dalian Univ Technol, Sch Phys, Key Lab Mat Modificat Laser Ion & Electron Beams, Dalian 116024, Peoples R ChinaDalian Univ Technol, Sch Phys, Key Lab Mat Modificat Laser Ion & Electron Beams, Dalian 116024, Peoples R China
Gong, Li-Yue
Gao, Fei
论文数: 0引用数: 0
h-index: 0
机构:
Dalian Univ Technol, Sch Phys, Key Lab Mat Modificat Laser Ion & Electron Beams, Dalian 116024, Peoples R ChinaDalian Univ Technol, Sch Phys, Key Lab Mat Modificat Laser Ion & Electron Beams, Dalian 116024, Peoples R China
Gao, Fei
Wang, You-Nian
论文数: 0引用数: 0
h-index: 0
机构:
Dalian Univ Technol, Sch Phys, Key Lab Mat Modificat Laser Ion & Electron Beams, Dalian 116024, Peoples R ChinaDalian Univ Technol, Sch Phys, Key Lab Mat Modificat Laser Ion & Electron Beams, Dalian 116024, Peoples R China
机构:
Hanyang Univ, Dept Elect Engn, 222 Wangsimni Ro, Seoul 133791, South KoreaHanyang Univ, Dept Elect Engn, 222 Wangsimni Ro, Seoul 133791, South Korea
Park, Il-Seo
Kang, Hyun-Ju
论文数: 0引用数: 0
h-index: 0
机构:
Hanyang Univ, Dept Elect Engn, 222 Wangsimni Ro, Seoul 133791, South KoreaHanyang Univ, Dept Elect Engn, 222 Wangsimni Ro, Seoul 133791, South Korea
Kang, Hyun-Ju
Kim, Kyung-Hyun
论文数: 0引用数: 0
h-index: 0
机构:
Hanyang Univ, Dept Elect Engn, 222 Wangsimni Ro, Seoul 133791, South KoreaHanyang Univ, Dept Elect Engn, 222 Wangsimni Ro, Seoul 133791, South Korea
Kim, Kyung-Hyun
Chung, Chin-Wook
论文数: 0引用数: 0
h-index: 0
机构:
Hanyang Univ, Dept Elect Engn, 222 Wangsimni Ro, Seoul 133791, South KoreaHanyang Univ, Dept Elect Engn, 222 Wangsimni Ro, Seoul 133791, South Korea
机构:
Dalian Univ Technol, Sch Phys, Key Lab Mat Modificat Laser Ion & Electron Beams, Dalian 116024, Peoples R ChinaDalian Univ Technol, Sch Phys, Key Lab Mat Modificat Laser Ion & Electron Beams, Dalian 116024, Peoples R China
Du, Peng-Cheng
Zhao, Ming-Liang
论文数: 0引用数: 0
h-index: 0
机构:
Dalian Univ Technol, Sch Phys, Key Lab Mat Modificat Laser Ion & Electron Beams, Dalian 116024, Peoples R ChinaDalian Univ Technol, Sch Phys, Key Lab Mat Modificat Laser Ion & Electron Beams, Dalian 116024, Peoples R China
Zhao, Ming-Liang
Li, Hong
论文数: 0引用数: 0
h-index: 0
机构:
Dalian Univ, Coll Phys Sci & Technol, Dalian 116622, Peoples R ChinaDalian Univ Technol, Sch Phys, Key Lab Mat Modificat Laser Ion & Electron Beams, Dalian 116024, Peoples R China
Li, Hong
Gao, Fei
论文数: 0引用数: 0
h-index: 0
机构:
Dalian Univ Technol, Sch Phys, Key Lab Mat Modificat Laser Ion & Electron Beams, Dalian 116024, Peoples R ChinaDalian Univ Technol, Sch Phys, Key Lab Mat Modificat Laser Ion & Electron Beams, Dalian 116024, Peoples R China
Gao, Fei
Wang, You-Nian
论文数: 0引用数: 0
h-index: 0
机构:
Dalian Univ Technol, Sch Phys, Key Lab Mat Modificat Laser Ion & Electron Beams, Dalian 116024, Peoples R ChinaDalian Univ Technol, Sch Phys, Key Lab Mat Modificat Laser Ion & Electron Beams, Dalian 116024, Peoples R China
机构:
Nagoya Univ, Fac Engn, Dept Energy Engn & Sci, Nagoya, Aichi 4648603, JapanNagoya Univ, Fac Engn, Dept Energy Engn & Sci, Nagoya, Aichi 4648603, Japan
Razzak, MA
Takamura, S
论文数: 0引用数: 0
h-index: 0
机构:Nagoya Univ, Fac Engn, Dept Energy Engn & Sci, Nagoya, Aichi 4648603, Japan
Takamura, S
Uesugi, Y
论文数: 0引用数: 0
h-index: 0
机构:Nagoya Univ, Fac Engn, Dept Energy Engn & Sci, Nagoya, Aichi 4648603, Japan