ZrCoCe Getter Films for MEMS Vacuum Packaging

被引：15

作者：

Xu, Yaohua ^{[1
]}

Cui, Jiandong ^{[1
]}

Cui, Hang ^{[1
]}

Zhou, Hao ^{[1
]}

Yang, Zhimin ^{[1
]}

Du, Jun ^{[1
]}

机构：

[1] Gen Res Inst Nonferrous Met, Adv Elect Mat Inst, Beijing 100088, Peoples R China

来源：

JOURNAL OF ELECTRONIC MATERIALS | 2016年 / 45卷 / 01期

关键词：

Non-evaporable getter; thin films; ZrCoCe; DC magnetron sputtering; sorption property; vacuum packaging; SORPTION CHARACTERISTICS;

D O I：

10.1007/s11664-015-4098-5

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In order to specifically support the technology trend of increased miniaturization of micro electro mechanical systems (MEMS) devices, highly porous ZrCoCe non-evaporable getter (NEG) film has been produced by direct current magnetron sputtering from a preformed ZrCoCe alloy target. Scanning electron microscopy and x-ray diffraction analysis indicated that the ZrCoCe film is constructed with porous columnar crystals, which are further built up with assembled ZrCoCe amorphous or nanocrystalline grains with an average grain size of 5 nm. Gas sorption investigation shows that this film can be activated at a low temperature of 300A degrees C for 30 min and has excellent stable sorption characteristics. Sorption properties can be further improved with elevating activation temperatures due to nanocrystals growing and amorphous regions crystallizing. The capability of ZrCoCe films to withstand wafer physical or chemical cleaning processes is investigated, indicating their compatibility with MEMS vacuum packaging and the appropriate way to store them.

引用

页码：386 / 390

页数：5

共 16 条

[1]

ASTM, 2002, 79897 ASTM

[2]

Bemard C., 2007, SURF COAT TECH, V202, P4

[3] Vacuum properties of palladium thin film coatings [J].

Benvenuti, C ;

Chiggiato, P ;

Cicoira, F ;

L'Aminot, Y ;

Ruzinov, V .

VACUUM, 2004, 73 (02) :139-144

[4] Influence of the substrate coating temperature on the vacuum properties of Ti-Zr-V non-evaporable getter films [J].

Benvenuti, C ;

Chiggiato, P ;

Pinto, PC ;

Prodromides, A ;

Ruzinov, V .

VACUUM, 2003, 71 (1-2) :307-315

[5]

Benvenuti C., 2001, VACUUM, V60, P1

[6]

Boffio C., 1999, U.S. Patent, Patent No. [5, 961, 750, 5961750]

[7] Preparation and sorption characteristics of Zr-Co-RE getter films [J].

Bu, J. G. ;

Mao, C. H. ;

Zhang, Y. ;

Wei, X. Y. ;

Du, J. .

JOURNAL OF ALLOYS AND COMPOUNDS, 2012, 529 :69-72

[8]

Hidalgo J., 2012, SENSORS, V12, P2

[9] Zr/V/Fe thick film for vacuum packaging of MEMS [J].

Jin, YF ;

Wang, ZF ;

Zhao, L ;

Lim, PC ;

Wei, J ;

Wong, CK .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2004, 14 (05) :687-692

[10]

Li C. C., 2005, SURF COAT TECH, V200, P5

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