Reduction of surface scattering loss in polymer microrings using thermal-reflow technique

被引：42

作者：

Chao, CY ^{[1
]}

Guo, LJ ^{[1
]}

机构：

[1] Univ Michigan, Dept Elect Engn & Comp Sci, Solid State Elect Lab, Ann Arbor, MI 48109 USA

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 2004年 / 16卷 / 06期

基金：

美国国家科学基金会;

关键词：

microresonator; microring; polymer waveguide; surface tension; thermal effect;

D O I：

10.1109/LPT.2004.827413

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A thermal-reflow technique is used to greatly reduce surface roughness scattering loss in polymer microring devices. Smoother surfaces were achieved and verified by scanning electron microscopy. Reduction in surface roughness scattering was further supported by the loss measurement of both straight waveguides and microring resonators. The variance of surface roughness in a polymer microring device is estimated to decrease by 35-40 nm after the thermal-reflow treatment, corresponding to a loss reduction of similar to74 dB/cm.

引用

页码：1498 / 1500

页数：3

共 12 条

[1] Biochemical sensors based on polymer microrings with sharp asymmetrical resonance
Chao, CY
Guo, LJ
[J]. APPLIED PHYSICS LETTERS, 2003, 83 (08) : 1527 - 1529
[2] Thermal-flow technique for reducing surface roughness and controlling gap size in polymer microring resonators
Chao, CY
Guo, LJ
[J]. APPLIED PHYSICS LETTERS, 2004, 84 (14) : 2479 - 2481
[3] Polymer microring resonators fabricated by nanoimprint technique
Chao, CY
Guo, LJ
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2002, 20 (06): : 2862 - 2866
[4] GaAs microcavity channel-dropping filter based on a race-track resonator
Chin, MK
Youtsey, C
Zhao, W
Pierson, T
Ren, Z
Wu, SL
Wang, L
Zhao, YG
Ho, ST
[J]. IEEE PHOTONICS TECHNOLOGY LETTERS, 1999, 11 (12) : 1620 - 1622
[5] OPTICAL WAVEGUIDES IN SINGLE LAYERS OF GA1-X ALX AS GROWN ON GAAS SUBSTRATES
GARMIRE, E
[J]. APPLIED PHYSICS LETTERS, 1973, 23 (07) : 403 - 404
[6] Soft lithography replication of polymeric microring optical resonators
Huang, YY
Paloczi, GT
Scheuer, J
Yariv, A
[J]. OPTICS EXPRESS, 2003, 11 (20): : 2452 - 2458
[7] Integrated optical microcavities for enhanced evanescent-wave spectroscopy
Krioukov, E
Klunder, DJW
Driessen, A
Greve, J
Otto, C
[J]. OPTICS LETTERS, 2002, 27 (17) : 1504 - 1506
[8] Wide tunable double ring resonator coupled lasers
Liu, B
Shakouri, A
Bowers, JE
[J]. IEEE PHOTONICS TECHNOLOGY LETTERS, 2002, 14 (05) : 600 - 602
[9] Polymer micro-ring filters and modulators
Rabiei, P
Steier, WH
Zhang, C
Dalton, LR
[J]. JOURNAL OF LIGHTWAVE TECHNOLOGY, 2002, 20 (11) : 1968 - 1975
[10] Propagation loss measurements in semiconductor microcavity ring and disk resonators
Rafizadeh, D
Zhang, JP
Tiberio, RC
Ho, ST
[J]. JOURNAL OF LIGHTWAVE TECHNOLOGY, 1998, 16 (07) : 1308 - 1314

← 1 2 →