VECTOR PROTON BEAM WRITING SYSTEM

被引：2
|
作者：
Polozhii, H. E. [1 ]
Ponomarev, A. G. [1 ]
Kolinko, S., V [1 ]
Rebrov, V. A. [1 ]
机构：
[1] Natl Acad Sci Ukraine, Inst Appl Phys, Kiev, Ukraine
来源：
PROBLEMS OF ATOMIC SCIENCE AND TECHNOLOGY | 2022年 / 03期
关键词：
MICROPROBE;
D O I：
10.46813/2022-139-052
中图分类号：
O57 [原子核物理学、高能物理学];
学科分类号：
070202 ;
摘要：
Vector method for scanning with focused beam of megaelectronvolt-energy in proton-beam writing is described. Vector proton-beam writing method was proven experimentally to have numerous advantages over raster method. Focused beam size and shape are measured by scanning standard copper mesh for e-beam microscopy. Prospectives of hardware and software upgrade are regarded. Vector proton-beam writing technology can be used in many applications, including X-ray optics, electronics prototyping, microrobotics, microfluidics, photonics and microstructure fabrication in new materials.
引用
收藏
页码：52 / 55
页数：4
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