Continuous and Localized Mn Implantation of ZnO

被引：16

作者：

Sanz, R. ^{[1
]}

Jensen, J. ^{[2
]}

Gonzalez-Diaz, G. ^{[3
]}

Martinez, O. ^{[4
]}

Vazquez, M. ^{[1
]}

Hernandez-Velez, M. ^{[1
,5
]}

机构：

[1] CSIC, Inst Ciencia Mat Madrid, Madrid 28049, Spain

[2] Linkoping Univ, IFM, Dept Phys Chem & Biol, Thin Film Phys Div, S-58183 Linkoping, Sweden

[3] Univ Complutense Madrid, Dept Fis Aplicada Elect & Elect 3, Madrid, Spain

[4] Univ Valladolid, Dept Fis Mat Condensada, Optronlab Grp, E-47011 Valladolid, Spain

[5] Univ Autonoma Madrid, E-28049 Madrid, Spain

来源：

NANOSCALE RESEARCH LETTERS | 2009年 / 4卷 / 08期

关键词：

Ion implantation; Nanoporous anodic alumina; Magnetic semiconductors; Magnetic properties; ZnO; FERROMAGNETISM; FABRICATION; NANOWIRES; ARRAYS; TIO2;

D O I：

10.1007/s11671-009-9327-5

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

We present results derived from continuous and localized 35 keV Mn-55(+) ion implantations into ZnO. Localized implantations were carried out by using self-ordered alumina membranes as masks leading to ordered arrays of implanted volumes on the substrate surfaces. Defects and vacancies in the small implantation volumes of ZnO were generated due to the implantation processes besides the creation of new phases. Rapid thermal annealing was applied in the case of continuous implantation. The samples were characterized by HRSEM, GIXRD, Raman spectroscopy and RBS/C. Magnetic characterization of the samples pointed out appreciable differences among the samples obtained by the different implantation methods. This fact was mainly attributed to the different volume/surface ratios present in the implanted zones as well as to the increase of Mn atom concentrations along the grain frontiers in the nanostructured surfaces. The samples also showed a ferromagnetic transition phase at temperature value higher than room temperature.

引用

页码：878 / 887

页数：10

共 30 条

[1] Isotopic study of the nitrogen-related modes in N+-implanted ZnO [J].