A microstructural study of transparent metal oxide gas barrier films

被引：92

作者：

Henry, BM

Dinelli, F

Zhao, KY

Grovenor, CRM

Kolosov, OV

Briggs, GAD

Roberts, AP

Kumar, RS

Howson, RP

机构：

[1] Univ Oxford, Dept Mat, Oxford OX1 3PH, England

[2] Loughborough Univ Technol, Dept Phys, Loughborough LE11 3TU, Leics, England

来源：

THIN SOLID FILMS | 1999年 / 355卷

关键词：

aluminum oxide; aluminum coating; microstructure; gas barrier film;

D O I：

10.1016/S0040-6090(99)00461-7

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The relationship between the microstructure and the water vapour transmission rates of aluminium oxide and aluminium coatings deposited by magnetron sputtering on polyethylene terephthalate have been investigated. The gas barrier properties of the films have been measured as a function of temperature and a range of techniques used to characterize the coatings including atomic force microscopy, which also provided information on the early growth mechanism. It was found that the Al/PET film showed a better water vapour barrier than the AlOx/PET although the activation energy for water vapour permeation was the same for both. We propose that the interaction of water with the barrier coating plays a significant part in determining the observed gas barrier performance. (C) 1999 Elsevier Science S.A. All rights reserved.

引用

页码：500 / 505

页数：6

共 14 条

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PHILLIPS RW, 1993, P SOC VAC COAT 36 AN, P293

[12] ADHESION, MICROSTRUCTURE AND COMPOSITION OF THERMALLY EVAPORATED ALUMINUM THIN-LAYERS ON POLYETHYLENE TEREPHTHALATE FILMS [J].