Silicon-Microtube Scaffold Decorated with Anatase TiO2 as a Negative Electrode for a 3D Litium-Ion Microbattery

被引：66

作者：

Eustache, Etienne ^{[1
,2
,3
,4
]}

Tilmant, Pascal ^{[1
]}

Morgenroth, Laurence ^{[1
]}

Roussel, Pascal ^{[5
]}

Patriarche, Gilles ^{[6
]}

Troadec, David ^{[1
]}

Rolland, Nathalie ^{[1
,3
,4
]}

Brousse, Thierry ^{[2
,4
]}

Lethien, Christophe ^{[1
,3
,4
]}

机构：

[1] Univ Lille 1, CNRS, UMR 8520, IEMN, F-59652 Villeneuve Dascq, France

[2] Univ Nantes, CNRS, UMR 6502, IMN JR, F-44322 Nantes 3, France

[3] Univ Lille 1, CNRS, USR 3380, Inst Rech Composants Logiciels & Mat Informat & C, F-59650 Villeneuve Dascq, France

[4] CNRS, FR 3459, RS2E, F-80039 Amiens, France

[5] Univ Lille 1, CNRS, UMR 8181, UCCS, F-59655 Villeneuve Dascq, France

[6] CNRS, UPR 20, LPN, F-91460 Marcoussis, France

来源：

ADVANCED ENERGY MATERIALS | 2014年 / 4卷 / 08期

关键词：

STRUCTURAL-CHANGES; LITHIUM INSERTION; HIGH-CAPACITY; NANOWIRES; LI; FABRICATION; ANODES; REACTIVITY; LIMITS;

D O I：

10.1002/aenm.201301612

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

An optimized scaffold based on silicon microtubes is designed to increase the surface capacity of 3D lithium-ion microbatteries. High-depth, mechanically robust microstructures are fabricated using microelectronic facilities. Conformal deposition of anatase TiO2 is achieved using atomic layer deposition, realizing the targeted improvement for microbatteries; a surface capacity of 0.2 mA h cm(-2) at a charge rate of C/1 0 is obtained in standard liquid electrolyte. This work paves the way for the fabrication of solid-state 3D Li-ion microbatteries with an efficient 3D scaffold.

引用

页数：11

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