Evolution of Unified-RAM: 1T-DRAM and BE-SONOS Built on a Highly Scaled Vertical Channel

被引:12
作者
Moon, Dong-Il [1 ]
Kim, Jee-Yeon [1 ]
Moon, Joon-Bae [1 ]
Kim, Dong-Oh [1 ]
Choi, Yang-Kyu [1 ]
机构
[1] Korea Adv Inst Sci & Technol, Dept Elect Engn, Taejon 305701, South Korea
基金
新加坡国家研究基金会;
关键词
Bandgap engineering; capacitorless; 1T-DRAM; multifunction; nonvolatile memory; SONOS; unified-RAM (URAM); vertical channel; URAM; DRAM; CELL;
D O I
10.1109/TED.2013.2292316
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
4F(2) multifunctional unified-RAM based on a highly scaled vertical channel is experimentally demonstrated. The high performance and reliable operation of bandgap-engineered nonvolatile memory as well as underlap 1T-DRAM with nonuniform channel doping for a long retention time and endurable operation is presented in a single transistor.
引用
收藏
页码:60 / 65
页数:6
相关论文
共 15 条
  • [1] Patterning sub-30-nm MOSFET gate with i-line lithography
    Asano, K
    Choi, YK
    King, TJ
    Hu, CM
    [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 2001, 48 (05) : 1004 - 1006
  • [2] Suppression of random dopant-induced threshold voltage fluctuations in sub-0.1-μm MOSFET's with epitaxial and δ-doped channels
    Asenov, A
    Saini, S
    [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1999, 46 (08) : 1718 - 1724
  • [3] ANALYSIS AND CONTROL OF FLOATING-BODY BIPOLAR EFFECTS IN FULLY DEPLETED SUBMICROMETER SOI MOSFETS
    CHOI, JY
    FOSSUM, JG
    [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1991, 38 (06) : 1384 - 1391
  • [4] Choi S.-J., 2010, P IEEE IEDM DEC, P532
  • [5] Han JW, 2008, S VLSI TECH, P157
  • [6] A unified-RAM (URAM) cell for multi-functioning capacitorless DRAM and NVM
    Han, Jin-Woo
    Ryu, Seong-Wan
    Kim, Chungjin
    Kim, Sungho
    Im, Maesoon
    Choi, Sung Jin
    Kim, Jin Soo
    Kim, Kwang Hee
    Lee, Gi Sung
    Oh, Jae Sub
    Song, Myeong Ho
    Park, Yun Chang
    Kim, Jeoung Woo
    Choi, Yang-Kyu
    [J]. 2007 IEEE INTERNATIONAL ELECTRON DEVICES MEETING, VOLS 1 AND 2, 2007, : 929 - +
  • [7] Han JW, 2008, INT EL DEVICES MEET, P227
  • [8] Hwang S.-M., 2011, P S VLSI TECHN JUN, P172
  • [9] Lue Hang-Ting., 2005, Electron Devices Meeting, P547
  • [10] Moon D. I., 2010, IEDM, P284