共 18 条
- [1] Abramowitz M., 1972, HDB MATH FUNCTIONS, P360
- [2] Beyer H., 1974, THEORIE PRAXIS INTER
- [3] Dispersion-free absolute interferometry based on angular spectrum scanning [J]. OPTICS EXPRESS, 2006, 14 (02): : 655 - 663
- [4] FRANCON M, 1966, OPTICAL INTERFEROMET
- [5] Lateral shearing interferometer for phase shift mask measurement at 193 nm [J]. OPTICAL MICROLITHOGRAPHY XV, PTS 1 AND 2, 2002, 4691 : 541 - 551
- [6] FUTTERER G, 2005, P SOC PHOTO-OPT INS, V5858, P321
- [8] HANSEN G, 1942, ZEISS NACHRICHTEN, P289
- [9] Kuechel M., 2004, United Stated patents, Patent No. [6804011[P], 6804011]
- [10] DER RAUMLICHE INTERFERENZSTREIFENVERLAUF DER KEILINTERFERENZEN [J]. OPTICA ACTA, 1964, 11 (02): : 89 - &