Guidelines for Tilt Measurements Realized by MEMS Accelerometers

被引：30

作者：

Luczak, Sergiusz ^{[1
]}

机构：

[1] Warsaw Univ Technol, Inst Micromech & Photon, Fac Mechatron, PL-02525 Warsaw, Poland

来源：

INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING | 2014年 / 15卷 / 03期

关键词：

Tilt sensor; Accelerometer; Accuracy; Sensitivity; MEMS; MODEL;

D O I：

10.1007/s12541-014-0362-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The paper discusses thoroughly a problem of determining tilt over various measurement ranges by measuring Cartesian components of the gravity acceleration with application of accelerometers that are Microelectromechanical Systems (MEMS). The presented standard and original methods are based on various mathematical relationships between the components and the pitch and the roll. Their application results in the fact that the realized measurements are characterized by different sensitivity and accuracy (experimentally evaluated to be of 0.18 degrees-2 degrees for a tilt sensor built of standard MEMS accelerometers). Each method is discussed in detail with regard to the respective sensitivity and accuracy of the measurement, and its application scope is determined. Essential part of the paper are guidelines for an optimal selection of the number and type of MEMS accelerometers, as well as appropriate mathematical formula, to be used in a specific case of tilt measurement.

引用

页码：489 / 496

页数：8

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