A dynamic equilibrium method for the SnO2-based ozone sensors using UV-LED continuous irradiation

被引：32

作者：

Jeng, Chien-Chung ^{[1
,2
]}

Chong, Paul J. H. ^{[1
]}

Chiu, Cheng-Chung ^{[2
]}

Jiang, Guo-Jhen ^{[1
]}

Lin, Hung-Ju ^{[2
]}

Wu, Ren-Jang ^{[3
]}

Wu, Chiu-Hsien ^{[1
,2
]}

机构：

[1] Natl Chung Hsing Univ, Inst Nanosci, Taichung 402, Taiwan

[2] Natl Chung Hsing Univ, Dept Phys, Taichung 402, Taiwan

[3] Providence Univ, Dept Appl Chem, Taichung 43301, Taiwan

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2014年 / 195卷

关键词：

Dynamics equilibrium; Gas sensor; Ozone; Time constant; UV-LED; Room temperature sensing; GAS SENSOR; FILMS; ACTIVATION;

D O I：

10.1016/j.snb.2014.01.034

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

We report the sensing characteristics of SnO2 thin-film gas sensors operated under room temperature. The sensor was continuously irradiated during sensing with ultraviolet (UV) light from a single 370-nm UV light-emitting diode (LED). The saturation resistance and sensitivity of the developed SnO2 sensor were observed to depend on the LED power. The SnO2 films produced a good response to ozone (O-3), and this response showed good reproducibility under a dynamic O-3 concentration of 5-14 ppm, and under a stable concentration. The time constant of absorption as a function of the trace O-3 concentration was analyzed, and the results showed a promising correlation between time constant and concentration. The humidity affects the lowest measured resistance, but not the response. We propose the presence of a dynamic equilibrium between the background conditions to explain the working mechanism of our sensor system. Crown Copyright (C) 2014 Published by Elsevier BY. All rights reserved.

引用

页码：702 / 706

页数：5

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