Size effect and strain rate sensitivity in benzocyclobutene film

被引:4
作者
Liu, DL
Lu, TM
Wang, GC
Picu, RC [1 ]
机构
[1] Rensselaer Polytech Inst, Dept Mech Aerosp & Nucl Engn, Troy, NY 12180 USA
[2] Rensselaer Polytech Inst, Dept Phys Appl Phys & Astron, Troy, NY 12180 USA
基金
美国国家科学基金会;
关键词
D O I
10.1063/1.1805710
中图分类号
O59 [应用物理学];
学科分类号
摘要
The mechanical properties of benzocyclobutene film are investigated at the nanoscale by nano-indentation using atomic force microscopy (AFM). The force versus indentation depth data were collected with two different AFM tips of radii similar to20 and similar to380 nm. A strong size effect of the plastic flow stress was observed as the radius of the indenter tip was reduced. More important, the material exhibited pronounced strain rate sensitivity when,probed at the nanoscale, while it was rate insensitive at larger scales. These two size effects were quantified by analytic and finite element modeling. (C) 2004 American Institute of Physics.
引用
收藏
页码:3053 / 3055
页数:3
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