One-dimensional photonic bandgap microcavities for strong optical confinement in GaAs and GaAs/AlxOy semiconductor waveguides

被引:57
作者
Ripin, DJ [1 ]
Lim, KY
Petrich, GS
Villeneuve, PR
Fan, SH
Thoen, ER
Joannopoulos, JD
Ippen, EP
Kolodziejski, LA
机构
[1] MIT, Ctr Mat Sci & Engn, Elect Res Lab, Dept Phys, Cambridge, MA 02139 USA
[2] MIT, Ctr Mat Sci & Engn, Elect Res Lab, Dept Elect Engn & Comp Sci, Cambridge, MA 02139 USA
[3] MIT, Ctr Mat Sci & Engn, Elect Res Lab, Dept Phys, Cambridge, MA 02139 USA
[4] MIT, Ctr Mat Sci & Engn, Elect Res Lab, Dept Elect Engn & Comp Sci, Cambridge, MA 02139 USA
基金
美国国家科学基金会;
关键词
gallium alloys; nanotechnology; optical materials; optical waveguide filters; optical waveguide theory; semiconductor waveguides;
D O I
10.1109/50.803006
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Photonic bandgap (PBG) waveguide microcavities with tightly confined resonant optical modes have been designed, fabricated using high-dielectric-contrast GaAs/AlxOy, III-V compound semiconductor structures, and characterized optically, The photonic crystal lattices are defined by one-dimensional (1-D) arrays of holes in waveguides, and a controlled defect in the spacing between two holes of an array defines a microcavity, Waveguide microcavity resonances have been studied in both monorail and suspended air-bridge geometries. Resonance states with cavity Q's as high as 360 mere measured at wavelengths near 1.55 mu m, with modal volumes as small as 0.026 mu m(3), which corresponds to only two times (lambda/2n)(3).
引用
收藏
页码:2152 / 2160
页数:9
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