Design and Fabrication of Integrated Magnetic MEMS Energy Harvester for Low Frequency Applications

被引:77
作者
Han, Mengdi [1 ]
Yuan, Quan [1 ]
Sun, Xuming [1 ]
Zhang, Haixia [1 ]
机构
[1] Peking Univ, Inst Microelect, Beijing 100871, Peoples R China
基金
中国国家自然科学基金;
关键词
Electromagnetic energy harvester; low frequency; system-level simulation; CoNiMnP electroplating; GENERATOR; OPTIMIZATION; VIBRATIONS;
D O I
10.1109/JMEMS.2013.2267773
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
An integrated vibration-to-electrical MEMS electromagnetic energy harvester with low resonant frequency is designed, simulated, fabricated and tested. Special structures and magnet arrays of the device are designed and simulated for favorable low frequency performance. Both FEM simulations and system-level simulations are conducted to investigate the induced voltage of the device. Two types of harvester are fabricated with different magnet arrays and the magnetic field of the two harvesters is investigated. With the combination of the microfabricated metal structures and the electroplated CoNiMnP permanent micro magnets, the designed harvesters are of small size (5 mm x 5 mm x 0.53 mm) without manual assembly of conventional bulk magnets. The output power density is 0.03 mu W/cm(3) with optimized resistance load at 64 Hz. This magnetic harvester is suitable for batch fabrication through MEMS process and can be utilized to drive microelectronic devices, such as micro implantable and portable devices.
引用
收藏
页码:204 / 212
页数:9
相关论文
共 28 条
[1]   A laser-micromachined multi-modal resonating power transducer for wireless sensing systems [J].
Ching, NNH ;
Wong, HY ;
Li, WJ ;
Leong, PHW ;
Wen, ZY .
SENSORS AND ACTUATORS A-PHYSICAL, 2002, 97-8 :685-690
[2]   A bidirectional magnetic microactuator using electroplated permanent magnet arrays [J].
Cho, HJ ;
Ahn, CH .
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2002, 11 (01) :78-84
[3]   Design and fabrication of a new vibration-based electromechanical power generator [J].
El-hami, M ;
Glynne-Jones, P ;
White, NM ;
Hill, M ;
Beeby, S ;
James, E ;
Brown, AD ;
Ross, JN .
SENSORS AND ACTUATORS A-PHYSICAL, 2001, 92 (1-3) :335-342
[4]   Vibration energy harvesting with aluminum nitride-based piezoelectric devices [J].
Elfrink, R. ;
Kamel, T. M. ;
Goedbloed, M. ;
Matova, S. ;
Hohlfeld, D. ;
van Andel, Y. ;
van Schaijk, R. .
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2009, 19 (09)
[5]   An electromagnetic, vibration-powered generator for intelligent sensor systems [J].
Glynne-Jones, P ;
Tudor, MJ ;
Beeby, SP ;
White, NM .
SENSORS AND ACTUATORS A-PHYSICAL, 2004, 110 (1-3) :344-349
[6]   FR4-based electromagnetic energy harvester for wireless sensor nodes [J].
Hatipoglu, G. ;
Urey, H. .
SMART MATERIALS AND STRUCTURES, 2010, 19 (01)
[7]   Piezoelectric MEMS Energy Harvester for Low-Frequency Vibrations With Wideband Operation Range and Steadily Increased Output Power [J].
Liu, Huicong ;
Tay, Cho Jui ;
Quan, Chenggen ;
Kobayashi, Takeshi ;
Lee, Chengkuo .
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2011, 20 (05) :1131-1142
[8]   MEMS electrostatic micropower generator for low frequency operation [J].
Mitcheson, PD ;
Miao, P ;
Stark, BH ;
Yeatman, EM ;
Holmes, AS ;
Green, TC .
SENSORS AND ACTUATORS A-PHYSICAL, 2004, 115 (2-3) :523-529
[9]   Investigation of a resonance microgenerator [J].
Mizuno, M ;
Chetwynd, DG .
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2003, 13 (02) :209-216
[10]   Development of a rotary electromagnetic microgenerator [J].
Pan, C. T. ;
Wu, T. T. .
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2007, 17 (01) :120-128