Micromachined chip-scale plasma light source

被引：10

作者：

Carazzetti, P. ^{[1
]}

Renaud, Ph. ^{[1
]}

Shea, H. ^{[1
]}

机构：

[1] Ecole Polytech Fed Lausanne, CH-1015 Lausanne, Switzerland

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2009年 / 154卷 / 02期

关键词：

Plasma; Interdigitated electrodes; Anodic bonding; Hermetic sealing; Light source; Impedance matching; Spectroscopy; Micromachining; Aluminum electrodes; STRUCTURED ELECTRODE ARRAYS; ELECTRICAL BREAKDOWN; ATMOSPHERIC-PRESSURE; FIELD BREAKDOWN; DEVICES; TECHNOLOGY; DISCHARGES; AIR;

D O I：

10.1016/j.sna.2008.05.028

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We report on the microfabrication and testing of a chip-scale plasma light source. The device consists of a stack of three anodically bonded Pyrex wafers, which hermetically enclose a gas-filled cavity containing interdigitated Aluminum electrodes. When the electrodes are powered through an impedance matching circuit, these devices have been used to generate stable millimeter-size RF plasma discharges operating continuously for over 24 h in He or At at pressures ranging from 10 to 500 mbar at RF powers of 300-1500 mW. (C) 2008 Elsevier B.V. All rights reserved.

引用

页码：275 / 280

页数：6

共 21 条

[1] Micro-structured electrode arrays:: high-frequency discharges at atmospheric pressure -: characterization and new applications [J].

Baars-Hibbe, L ;

Schrader, C ;

Sichler, P ;

Cordes, T ;

Gericke, KH ;

Büttgenbach, S ;

Draeger, S .

VACUUM, 2004, 73 (3-4) :327-332

[2]

Carazzetti P, 2008, PROC IEEE MICR ELECT, P818

[3]

CARAZZETTI P, 2008, P SPIE PHOTONICS W, P6884

[4] Electrical breakdown phenomena for devices with micron separations [J].

Chen, Ching-Heng ;

Yeh, J. Andrew ;

Wang, Pei-Jen .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2006, 16 (07) :1366-1373

[5] Electric field breakdown at micrometre separations in air and nitrogen at atmospheric pressure [J].

Dhariwal, RS ;

Torres, JM ;

Desmulliez, MPY .

IEE PROCEEDINGS-SCIENCE MEASUREMENT AND TECHNOLOGY, 2000, 147 (05) :261-265

[6] A molecular emission detector on a chip employing a direct current microplasma [J].

Eijkel, JCT ;

Stoeri, H ;

Manz, A .

ANALYTICAL CHEMISTRY, 1999, 71 (14) :2600-2606

[7] A microwave-induced plasma based on microstrip technology and its use for the atomic emission spectrometric determination of mercury with the aid of the cold-vapor technique [J].

Engel, U ;

Bilgiç, AM ;

Haase, O ;

Voges, E ;

Broekaert, JAC .

ANALYTICAL CHEMISTRY, 2000, 72 (01) :193-197

[8]

*IC SARL, PSE A CH 1015

[9] Direct optical emission spectroscopy of liquid analytes using an electrolyte as a cathode discharge source (ELCAD) integrated on a micro-fluidic chip [J].

Jenkins, G ;

Franzke, J ;

Manz, A .

LAB ON A CHIP, 2005, 5 (07) :711-718

[10] Microplasmas for chemical analysis: analytical tools or research toys? [J].

Karanassios, V .

SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 2004, 59 (07) :909-928

← 1 2 3 →