Electron-beam-generated plasmas for materials processing

被引：60

作者：

Walton, SG ^{[1
]}

Muratore, C ^{[1
]}

Leonhardt, D ^{[1
]}

Fernsler, RF ^{[1
]}

Blackwell, DD ^{[1
]}

Meger, RA ^{[1
]}

机构：

[1] USN, Res Lab, Div Plasma Phys, Washington, DC 20375 USA

来源：

SURFACE & COATINGS TECHNOLOGY | 2004年 / 186卷 / 1-2期

关键词：

C] PIII; C] nitriding; C] PACVD; C] PAPVD; X] electron beam produced;

D O I：

10.1016/j.surfcoat.2004.04.007

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The results of investigations aimed at characterizing pulsed, electron-beam-produced plasmas for use in materials processing applications are discussed. In situ diagnostics of the bulk plasma and at the plasma/surface interface are reported for plasmas produced in Ar, N-2, and mixtures thereof Langmuir probes were employed to determine the local electron temperature, plasma density, and plasma potential within the plasma, while ion energy analysis and mass spectrometry were used to interrogate the ion flux at an electrode located adjacent to the plasma. The results illustrate the unique capabilities of electron-beam-produced plasmas and the various parameters available to optimize operating conditions for applications such as nitriding, etching, and thin film deposition. (C) 2004 Elsevier B.V. All rights reserved.

引用

页码：40 / 46

页数：7

共 50 条

[31] Optical electron-beam diagnostics of free supersonic jet of nitrogen activated by electron-beam-generated plasma
Sharafutdinov, R. G.
Baranov, E. A.
Khmel', S. Ya.
TECHNICAL PHYSICS LETTERS, 2011, 37 (12) : 1172 - 1175
[32] Characterizations of Electron Beam-Generated Plasmas
Walton, S.G.
Leonhardt, D.
Fernsler, R.F.
Meger, R.A.
Blackwell, D.D.
Muratore, C.
Proc Annu Tech Conf Soc Vac Coaters, 1600, (447-451):
[33] ELECTRON-BEAM-GENERATED HOLOGRAPHIC MASKS FOR OPTICAL VECTOR-MATRIX MULTIPLICATION.
Arnold, Steven M.
Case, Steven K.
Optical Engineering, 1984, 23 (01) : 079 - 082
[34] AVALANCHE MULTIPLICATION OF ELECTRON-BEAM-GENERATED CARRIERS IN A SILICON P-N-JUNCTION
DONOLATO, C
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1977, 10 (13) : 1781 - 1788
[35] ELECTRON BEAM FOCUSSING EFFECTS IN BEAM-GENERATED PLASMAS
DUNN, DA
HALSTED, AS
VACUUM, 1965, 15 (09) : 453 - &
[36] COLLECTION OF ELECTRON-BEAM-GENERATED CARRIERS IN THE PRESENCE OF A GRAIN-BOUNDARY OR AN EPITAXIAL INTERFACE
PAZ, O
BORREGO, JM
JOURNAL OF APPLIED PHYSICS, 1987, 61 (04) : 1537 - 1546
[37] The spatial profile of density in electron beam generated plasmas
Boris, D. R.
Fernsler, R. F.
Walton, S. G.
SURFACE & COATINGS TECHNOLOGY, 2014, 241 : 13 - 18
[38] The influence of magnetic field on electron beam generated plasmas
Petrov, G. M.
Boris, D. R.
Lock, E. H.
Petrova, Tz B.
Fernsler, R. F.
Walton, S. G.
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2015, 48 (27)
[39] Carbon nanotube generated electron beam produced plasmas
Masoud, N.
Martus, K.
Murnick, D.
PLASMA SOURCES SCIENCE & TECHNOLOGY, 2019, 28 (04):
[40] Electron beam generated plasmas: Theory, experiments, applications
Kuzelev, MV
Mkheidze, GP
Rukhadze, AA
Strelkov, PS
Shkvarunets, AG
ADVANCED TECHNOLOGIES BASED ON WAVE AND BEAM GENERATED PLASMAS, 1999, 67 : 391 - 428

← 1 2 3 4 5 →