Video-rate surface profiling with acousto-optic accordion fringe interferometry

被引：24

作者：

Mermelstein, MS

Feldkhun, DL

Shirley, LG

机构：

[1] MIT, Lincoln Lab, Cambridge, MA 02139 USA

[2] MIT, Lincoln Lab, Lexington, MA 02420 USA

来源：

OPTICAL ENGINEERING | 2000年 / 39卷 / 01期

关键词：

active triangulation; three-dimensional metrology; surface profiling; profilometry inspection; depth discrimination; interferometry; acousto-optic;

D O I：

10.1117/1.602342

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A novel, solid state, structured-light projector is developed that can adjust the spatial phase and period of projected interference fringes with unprecedented speed, repeatability, and accuracy. The projector is applied to video-rate 3-D surface profilometry using accordion fringe interferometry (AFI), a phase-measuring multiresolution active triangulation technique. We present the theory of the technology, the characterization of our prototype, and the 3-D measurement results. (C) 2000 Society of Photo-Optical Instrumentation Engineers. [S0091-3286(00)01301-5].

引用

页码：106 / 113

页数：8

共 15 条

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[2]

Creath K., 1988, Progress in optics. Vol.XXVI, P349, DOI 10.1016/S0079-6638(08)70178-1

[3]

DRUMHELLER M, 1986, P 1986 IEEE INT C RO, V3, P1439

[4]

FELDKHUN DL, 1999, THESIS MIT CAMBRIDGE