Competition between strain and chemistry effects on adhesion of Si and SiC

被引:6
|
作者
Liu, Y. [1 ]
Szlufarska, I. [1 ]
机构
[1] Univ Wisconsin, Madison, WI 53706 USA
关键词
ab initio calculations; adhesion; compressive strength; elemental semiconductors; monolayers; silicon; silicon compounds; surface chemistry; surface reconstruction; wide band gap semiconductors; TOTAL-ENERGY CALCULATIONS; WAVE BASIS-SET; FAILURE MECHANISMS; SURFACE; MEMS; OXIDATION;
D O I
10.1103/PhysRevB.79.094109
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We use ab initio calculations to demonstrate that adhesion of Si and SiC depends on the interplay between surface strain and chemistry. We discover that work of adhesion of Si depends linearly on surface strain. Compressive surface strain increases adhesion, which explains why bare Si-terminated SiC has larger adhesion than Si. However, with as little as one monolayer of oxygen coverage, adhesion of SiC becomes negligible while adhesion of Si remains finite irrespectively of the specific oxygen configuration. This effect is due to fundamental differences between reactivities of Si and SiC during the early stages of oxidation.
引用
收藏
页数:5
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