Pulsed-laser ablation and deposition of advanced materials

被引：0
|
作者：
Pedarnig, JD [1 ]
Vrejoiu, I [1 ]
Peruzzi, M [1 ]
Matei, D [1 ]
Bäuerle, D [1 ]
Dinescu, M [1 ]
机构：
[1] Johannes Kepler Univ, A-4040 Linz, Austria
来源：
HIGH-POWER LASER ABLATION V, PTS 1 AND 2 | 2004年 / 5448卷
关键词：
pulsed-laser ablation; pulsed-laser deposition; PTFE polymer; ceramic/polymer composites; ZnO; GaPO4;
D O I：
10.1117/12.548157
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Pulsed-laser deposition is a unique technique that has been employed for thin film growth of a broad variety of materials. We report on the deposition and characterization of advanced piezoelectric thin films and ceramic / polymer composite layers. Pulsed-laser ablation and micro-patterning of piezoelectric GaPO4 is presented.
引用
收藏
页码：65 / 72
页数：8
相关论文
共 50 条
  • [31] PULSED-LASER DEPOSITION OF EPITAXIAL LAYERS OF ZNSE
    DEISS, JL
    CHERGUI, A
    KOUTTI, L
    LOISON, JL
    ROBINO, M
    GRUN, JB
    APPLIED SURFACE SCIENCE, 1995, 86 (1-4) : 149 - 153
  • [32] Growth of ZnSe nanowires by pulsed-laser deposition
    Zhang, Tinwei
    Shen, Yiqun
    Hu, Wei
    Sun, Jian
    Wu, Jiada
    Ying, Zhifeng
    Xu, Ning
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2007, 25 (06): : 1823 - 1826
  • [33] New developments of pulsed-laser deposition process
    Okada, T
    Nakata, Y
    Muramoto, J
    Maeda, M
    LASER APPLICATIONS IN MICROELECTRONIC AND OPTOELECTRONIC MANUFACTURING III, 1998, 3274 : 246 - 254
  • [34] ION-ASSISTED PULSED-LASER DEPOSITION
    READE, RP
    CHURCH, SR
    RUSSO, RE
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1995, 66 (06): : 3610 - 3614
  • [35] Pulsed-laser deposition and characterization of thin films
    Bäuerle, D
    Dinescu, M
    Dinu, R
    Pedarnig, J
    Heitz, J
    Schwödiauer, R
    Bauer, S
    Bauer-Gogonea, S
    PIEZOELECTRIC MATERIALS: ADVANCES IN SCIENCE, TECHNOLOGY AND APPLICATIONS, 2000, 76 : 261 - 271
  • [36] ZEOLITE MEMBRANES FABRICATED BY PULSED-LASER DEPOSITION
    PEACHEY, NM
    ESPINOZA, BF
    DYE, RC
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1995, 209 : 95 - PETR
  • [37] Pulsed-laser deposition and characterization of TaC films
    Universita della Basilicata, Potenza, Italy
    Appl Surf Sci, 1 (190-195):
  • [38] REACTIVE PULSED-LASER DEPOSITION OF CNX FILMS
    ZHAO, XA
    ONG, CW
    TSANG, YC
    WONG, YW
    CHAN, PW
    CHOY, CL
    APPLIED PHYSICS LETTERS, 1995, 66 (20) : 2652 - 2654
  • [39] SYNTHESIS OF METASTABLE NITRIDES BY PULSED-LASER DEPOSITION
    TREECE, RE
    HORWITZ, JS
    CHRISEY, DB
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1994, 208 : 622 - INOR
  • [40] PULSED-LASER DEPOSITION OF THIN METALLIC ALLOYS
    KREBS, HU
    BREMERT, O
    APPLIED PHYSICS LETTERS, 1993, 62 (19) : 2341 - 2343
12345