Pulsed-laser ablation and deposition of advanced materials

被引:0
|
作者
Pedarnig, JD [1 ]
Vrejoiu, I [1 ]
Peruzzi, M [1 ]
Matei, D [1 ]
Bäuerle, D [1 ]
Dinescu, M [1 ]
机构
[1] Johannes Kepler Univ, A-4040 Linz, Austria
来源
关键词
pulsed-laser ablation; pulsed-laser deposition; PTFE polymer; ceramic/polymer composites; ZnO; GaPO4;
D O I
10.1117/12.548157
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Pulsed-laser deposition is a unique technique that has been employed for thin film growth of a broad variety of materials. We report on the deposition and characterization of advanced piezoelectric thin films and ceramic / polymer composite layers. Pulsed-laser ablation and micro-patterning of piezoelectric GaPO4 is presented.
引用
收藏
页码:65 / 72
页数:8
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