Development and Research Progress of Silicon-Based Microdisplays

Silicon-based microdisplays are based on single crystalline Si molecules, with a CMOS drive circuit integrated into their backplanes. Recently, these microdisplays have been widely used in near-to-eye display, projection, and augmented reality/virtual reality (AR/VR) fields due to their small size, high pixel density, fast switching speed, and low power consumption. Therefore, because of their emerging importance, this study reviewed four silicon-based microdisplays: digital mirror device (DMD), liquid crystal on silicon (LCoS), organic light emitting diode on silicon (OLED on silicon), and silicon-based micro-light-emitting diode (micro-LED on silicon). Then, we discussed the key technologies and research progresses of the OLED on silicon and micro-LED on silicon in detail. Consequently, our study proposed that their outstanding active luminescence, high resolution, high refresh ability, high contrast, and low power consumption characteristics show great application potential in near-to-eye display fields.