Investigation of the Structural-Phase State and the Impact-Protective Properties of Optically Transparent Si-Al-N Coatings

被引：3

作者：

Bozhko, Irina A. ^{[1
,2
]}

Rybalko, Evgeniya V. ^{[1
]}

Fedorischeva, Marina V. ^{[1
,2
]}

Sergeev, Victor P. ^{[1
,2
]}

机构：

[1] Inst Strength Phys & Mat Sci SB RAS, Tomsk 634055, Russia

[2] Natl Res Tomsk Polytech Univ, Tomsk 634050, Russia

来源：

INTERNATIONAL CONFERENCE ON ADVANCED MATERIALS WITH HIERARCHICAL STRUCTURE FOR NEW TECHNOLOGIES AND RELIABLE STRUCTURES 2015 | 2015年 / 1683卷

关键词：

magnetron deposition; protective coating; structure-phase state; microhardness; optical properties; crater density;

D O I：

10.1063/1.4932718

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The results of the study of the structural-phase state, the optical and impact-protective properties of Si-Al-N coatings with a thickness from 0.9 to 6.2 mu m deposited by pulsed magnetron sputtering on a substrate made of the KV type quartz glass are presented. The formation of the nanoscale single-phase AlN (hcp) with a crystallite size up to 20 nm was discovered by the X-ray diffraction method. Coatings based on Si-Al-N are characterized by high values of microhardness (H-mu approximate to 25 GPa) and the coefficient of elastic recovery (k(y) = 0.71-0.85). The Si-Al-N coatings are characterized by a high degree of transparency (about 80%) in the visible range of wavelengths and are completely opaque in the ultra-violet regions. The refractive index of the glass samples with coatings on the basis of Si-Al-N was determined using the transmission spectra whose value decreases from 2.04 to 1.87 with increasing thickness of coatings. The results of the study of the surface density of the craters formed on the surface of the initial quartz glass and the quartz glass with Si-Al-N coatings due to the influence of high-speed Fe particles of the micron size are described.

引用

页数：4

共 5 条

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[5]

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