A study on the dissolution inhibition of poly norbornene hexafluoroisopropanol in aqueous base solutions

被引：2

作者：

Toukhy, MA ^{[1
]}

Oberlander, J ^{[1
]}

Rahman, D ^{[1
]}

Houlihan, FM ^{[1
]}

机构：

[1] Clariant Corp, Somerville, NJ 08876 USA

来源：

ADVANCES IN RESIST TECHNOLOGY AND PROCESSING XXI, PTS 1 AND 2 | 2004年 / 5376卷

关键词：

D O I：

10.1117/12.537077

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

It is confirmed that strong inhibitors must not only interact with the polymer but also are highly hydrophobic. A proportional relationship was shown between the inhibition and log P of different additives. In general, PAGs also follow this relationship, however triphenylsulfonium PAGs appear to be less effective inhibitors than bis-t-butylphenyliodonium PAGs having the same anions.

引用

页码：384 / 391

页数：8

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