Construction of a low-frequency flat-type vibratory gyroscope using the combination of H-type and 3-arm-type vibrators

A new structure for low-frequency flat-type piezoelectric vibratory gyroscopes is proposed, and is analyzed by the finite-element method. The H-type vibrator is arranged at the center of the vibratory gyroscope, and is connected to two 3-arm-type vibrators by a central arm. In-plane modes of vibration are used for driving and detecting in this structure. The structure is negligibly affected by a support because the displacements at the support part become very small. Using the metal structure with the piezoelectric ceramics for driving and detecting, it was clarified that the vibratory gyroscope operates as an angular rate sensor.