Improving the performance of the micro jet array air cooling MEMS device using CFD

被引：0

作者：

Jung, Yangki ^{[1
]}

Selvam, R. Panneer ^{[1
]}

机构：

[1] Univ Arkansas, Fayetteville, AR 72701 USA

来源：

ADVANCES IN ELECTRONIC PACKAGING 2005, PTS A-C | 2005年

关键词：

micro-jet array; MEMS; finite difference method; impinging cooling device; heat transfer; compressible flow;

D O I：

10.1115/IPACK2005-73392

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In this work ways to improve the performance of the MJA is investigated using computer modeling. Finite-difference method is used to analyze and understand the heat transfer mechanism in the MEMS based air micro-jet array (MJA) impinging cooling device. The three-dimensional Navier-Stokes (NS) equations using the compressible flow are solved. The computed temperature distribution at the bottom of the MJA is in good agreement with the experimental measurement data. To improve the heat transfer performance, an optimum model is developed. This enhances the heat removal capacity about 100% (0.5 (2)(W/cm) (0)(C)). The details of computer modeling and the flow visualization to understand the flow and heat transfer in the MJA are presented.

引用

页码：545 / 552

页数：8

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