In-Run Navigation Grade Quartz MEMS-Based IMU

被引：11

作者：

Zotov, Sergey ^{[1
]}

Srivastava, Arvind ^{[1
]}

Kwon, Ken ^{[1
]}

Frank, Jeremy ^{[1
]}

Parco, Erwin ^{[1
]}

Williams, Martin ^{[1
]}

Shtigluz, Semen ^{[1
]}

Lyons, Kenneth ^{[1
]}

Frazee, Michael ^{[1
]}

Hoyh, David ^{[1
]}

Lu, Albert ^{[1
]}

机构：

[1] Emcore, Concort, CA USA

来源：

2020 7TH IEEE INTERNATIONAL SYMPOSIUM ON INERTIAL SENSORS AND SYSTEMS (INERTIAL 2020) | 2020年

关键词：

IMU; navigation grade; gyroscope; accelerometer; quartz MEMS;

D O I：

10.1109/inertial48129.2020.9090018

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Emcore has demonstrated in-run navigation grade performance with a compact inertial measurement unit (IMU) based on Systron Donner Inertial technology. The IMU is based on three quartz MEMS Coriolis vibratory gyroscopes (CVG) and three quartz MEMS resonant accelerometers. Experimental characterization of the gyroscope revealed angle random walk lower than 0.001 degrees/root hr (0.05 (degrees/hr)/root Hz) as well as bias instability of 0.005 degrees/hr at stable temperature and on the order of 0.01 degrees/hr at uncontrolled temperature. The accelerometer demonstrated a velocity random walk of 50 ug/gHz, with bias instability of a few mu g. This performance was achieved within the SDI500 form factor of 19 cubic inches.

引用

页数：4

共 50 条

[31] High-performance navigation grade resonant beam MEMS accelerometers [J].

Gurung, Lokesh ;

Miani, Theo ;

Sobreviela-Falces, Guillermo ;

Young, Douglas ;

Baker, Colin ;

Seshia, Ashwin .

2024 IEEE INTERNATIONAL SYMPOSIUM ON INERTIAL SENSORS AND SYSTEMS, INERTIAL, 2024,

[32] A 2μW three-axis MEMS-based accelerometer [J].

Denison, Timothy ;

Consoer, Kelly ;

Santa, Wesley ;

Hutt, Mike ;

Miesel, Keith .

2007 IEEE INSTRUMENTATION & MEASUREMENT TECHNOLOGY CONFERENCE, VOLS 1-5, 2007, :721-+

[33] A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices [J].

Algamili, Abdullah Saleh ;

Khir, Mohd Haris Md. ;

Dennis, John Ojur ;

Ahmed, Abdelaziz Yousif ;

Alabsi, Sami Sultan ;

Ba Hashwan, Saeed Salem ;

Junaid, Mohammed M. .

NANOSCALE RESEARCH LETTERS, 2021, 16 (01)

[34] Application of a Genetic Algorithm for Dimension Optimization of the MEMS-based Accelerometer [J].

Melnyk, Mykhaylo ;

Kernytskyy, Andriy ;

Lobur, Mykhaylo ;

Szermer, Michal ;

Zajac, Piotr ;

Zabierowski, Wojciech .

MIXED DESIGN OF INTEGRATED CIRCUITS AND SYSTEMS, MIXDES 2013, 2013, :352-354

[35] A MEMS IMU Gyroscope Calibration Method Based on Deep Learning [J].

Huang, Fengrong ;

Wang, Zhen ;

Xing, Luran ;

Gao, Chunyan .

IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, 2022, 71

[36] Application of MEMS-based Inertial Technology to Measurement of Rocket Projectile [J].

Duan Xiaomin ;

Liu Jun .

2011 INTERNATIONAL CONFERENCE ON ELECTRONICS, COMMUNICATIONS AND CONTROL (ICECC), 2011, :158-161

[37] A MEMS-Based Co-Oscillating Electrochemical Vector Hydrophone [J].

Zhong, Anxiang ;

Chen, Mingwei ;

Lu, Yulan ;

Chen, Jian ;

Chen, Deyong ;

Wang, Junbo .

MICROMACHINES, 2022, 13 (01)

[38] Signal Processing Algorithms for Position Measurement with MEMS-Based Accelerometer [J].

Du, J. ;

Gerdtman, C. ;

Linden, Maria .

16TH NORDIC-BALTIC CONFERENCE ON BIOMEDICAL ENGINEERING, 2015, 48 :36-39

[39] Study of MEMS-based Inertial Sensors Operating in Dynamic Conditions [J].

Stebler, Yannick ;

Guerrier, Stephane ;

Skaloud, Jan ;

Molinari, Roberto ;

Victoria-Feser, Maria-Pia .

2014 IEEE/ION POSITION, LOCATION AND NAVIGATION SYMPOSIUM - PLANS 2014, 2014, :1227-1231

[40] MEMS-based piezoresistive and capacitive microphones: A review on materials and methods [J].

Kumar, Ashish ;

Varghese, Arathy ;

Kalra, Dheeraj ;

Raunak, Anshuman ;

Jaiverdhan, Mahanth ;

Prasad, Mahanth ;

Janyani, Vijay ;

Yadav, R. P. .

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2024, 169

← 1 2 3 4 5 →