In-Run Navigation Grade Quartz MEMS-Based IMU

被引：11

作者：

Zotov, Sergey ^{[1
]}

Srivastava, Arvind ^{[1
]}

Kwon, Ken ^{[1
]}

Frank, Jeremy ^{[1
]}

Parco, Erwin ^{[1
]}

Williams, Martin ^{[1
]}

Shtigluz, Semen ^{[1
]}

Lyons, Kenneth ^{[1
]}

Frazee, Michael ^{[1
]}

Hoyh, David ^{[1
]}

Lu, Albert ^{[1
]}

机构：

[1] Emcore, Concort, CA USA

来源：

2020 7TH IEEE INTERNATIONAL SYMPOSIUM ON INERTIAL SENSORS AND SYSTEMS (INERTIAL 2020) | 2020年

关键词：

IMU; navigation grade; gyroscope; accelerometer; quartz MEMS;

D O I：

10.1109/inertial48129.2020.9090018

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Emcore has demonstrated in-run navigation grade performance with a compact inertial measurement unit (IMU) based on Systron Donner Inertial technology. The IMU is based on three quartz MEMS Coriolis vibratory gyroscopes (CVG) and three quartz MEMS resonant accelerometers. Experimental characterization of the gyroscope revealed angle random walk lower than 0.001 degrees/root hr (0.05 (degrees/hr)/root Hz) as well as bias instability of 0.005 degrees/hr at stable temperature and on the order of 0.01 degrees/hr at uncontrolled temperature. The accelerometer demonstrated a velocity random walk of 50 ug/gHz, with bias instability of a few mu g. This performance was achieved within the SDI500 form factor of 19 cubic inches.

引用

页数：4

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