Suppressed Critical Current in Superconducting Nanowire Single-Photon Detectors With High Fill-Factors

被引：24

作者：

Yang, Joel K. W. ^{[1
]}

Kerman, Andrew J. ^{[2
]}

Dauler, Eric A. ^{[2
]}

Cord, Bryan ^{[1
]}

Anant, Vikas ^{[1
,3
]}

Molnar, Richard J. ^{[2
]}

Berggren, Karl K. ^{[1
]}

机构：

[1] MIT, Cambridge, MA 02139 USA

[2] MIT, Lincoln Lab, Lexington, MA 02420 USA

[3] Exponent Inc, Natick, MA 01760 USA

来源：

IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY | 2009年 / 19卷 / 03期

关键词：

Critical current; detection efficiency; fabrication; single-photon detectors; FABRICATION;

D O I：

10.1109/TASC.2009.2017953

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this work we present a new fabrication process that enabled the fabrication of superconducting nanowire single photon detectors SNSPD with fill-factors as high as 88% with gaps between nanowires as small as 12 nm. This fabrication process combined high-resolution electron-beam lithography with photolithography. Although this work was motivated by the potential of increased detection efficiency with higher fill-factor devices, test results showed an unexpected systematic suppression in device critical currents with increasing fill-factor.

引用

页码：318 / 322

页数：5

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