Fabrication of patterned media for high density magnetic storage

被引：228

作者：

Ross, CA ^{[1
]}

Smith, HI

Savas, T

Schattenburg, M

Farhoud, M

Hwang, M

Walsh, M

Abraham, MC

Ram, RJ

机构：

[1] MIT, Dept Mat Sci & Engn, Cambridge, MA 02139 USA

[2] MIT, Dept Comp Sci & Elect Engn, Cambridge, MA 02139 USA

[3] MIT, Dept Phys, Cambridge, MA 02139 USA

[4] MIT, Ctr Space Res, Cambridge, MA 02139 USA

[5] Harvard Univ, Dept Phys, Cambridge, MA 02138 USA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1999年 / 17卷 / 06期

关键词：

D O I：

10.1116/1.590974

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Arrays of discrete, lithographically patterned magnetic elements have been proposed as a new generation of ultrahigh density patterned magnetic storage media. Interferometric lithography has been used to make prototype arrays over large areas with periods of 100-200 nm. Arrays of magnetic pillars, pyramids, and dots have been made by electrodeposition, evaporation and liftoff, and etching processes, and the magnetic properties of the particles and their mutual interactions have been measured. (C) 1999 American Vacuum Society. [S0734-211X(99)11906-1].

引用

页码：3168 / 3176

页数：9

共 53 条

[1] Angular dependence of nucleation by curling in a prolate spheroid [J].