Simulation of MEMS Capacitive ThermalSensor Based on Tip Deflection of a Functionally Graded Micro-beam

This work presents a simulation study on a novel micro thermal sensor to evaluate a different range of temperature. Micro Electro Mechanical Systems (MEMS) technology is an interesting field in mechanics andmetrology. In this work, a capacitive micro thermal sensor based on tip deflection of Functionally Graded Micro-beam (FGM) was designed. The thermo-electric mechanical equations based on Euler-Bernoulli beam theory were derived and solved using step-by-step linearization method. The increase in temperature was expressed with respect to the changes in the capacitance. The beam deflections were compared with the existing results showing good conformity with the highest error obtained as 4.3% at 65 degrees C.