Germanium Based Field-Effect Transistors: Challenges and Opportunities

被引:146
作者
Goley, Patrick S. [1 ]
Hudait, Mantu K. [1 ]
机构
[1] Virginia Tech, Bradley Dept Elect & Comp Engn, ADSEL, Blacksburg, VA 24061 USA
基金
美国国家科学基金会;
关键词
germanium; heterogeneous integration; passivation; buffer; high mobility; gate stack; quantum well; METAL-OXIDE-SEMICONDUCTOR; THREADING DISLOCATION DENSITY; CHEMICAL-VAPOR-DEPOSITION; ATOMIC LAYER DEPOSITION; KAPPA GATE DIELECTRICS; MOLECULAR-BEAM EPITAXY; QUANTUM-WELL; III-V; COMPOUND SEMICONDUCTORS; ELECTRICAL-PROPERTIES;
D O I
10.3390/ma7032301
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The performance of strained silicon (Si) as the channel material for today's metal-oxide-semiconductor field-effect transistors may be reaching a plateau. New channel materials with high carrier mobility are being investigated as alternatives and have the potential to unlock an era of ultra-low-power and high-speed microelectronic devices. Chief among these new materials is germanium (Ge). This work reviews the two major remaining challenges that Ge based devices must overcome if they are to replace Si as the channel material, namely, heterogeneous integration of Ge on Si substrates, and developing a suitable gate stack. Next, Ge is compared to compound III-V materials in terms of p-channel device performance to review how it became the first choice for PMOS devices. Different Ge device architectures, including surface channel and quantum well configurations, are reviewed. Finally, state-of-the-art Ge device results and future prospects are also discussed.
引用
收藏
页码:2301 / 2339
页数:39
相关论文
共 199 条
[1]   Interface traps and dangling-bond defects in (100)Ge/HfO2 -: art. no. 032107 [J].
Afanas'ev, VV ;
Fedorenko, YG ;
Stesmans, A .
APPLIED PHYSICS LETTERS, 2005, 87 (03)
[2]   Fermi level unpinning of GaSb (100) using plasma enhanced atomic layer deposition of Al2O3 [J].
Ali, A. ;
Madan, H. S. ;
Kirk, A. P. ;
Zhao, D. A. ;
Mourey, D. A. ;
Hudait, M. K. ;
Wallace, R. M. ;
Jackson, T. N. ;
Bennett, B. R. ;
Boos, J. B. ;
Datta, S. .
APPLIED PHYSICS LETTERS, 2010, 97 (14)
[3]   Small-Signal Response of Inversion Layers in High-Mobility In0.53Ga0.47As MOSFETs Made With Thin High-κ Dielectrics [J].
Ali, Ashkar ;
Madan, Himanshu ;
Koveshnikov, Sergei ;
Oktyabrsky, Serge ;
Kambhampati, Rama ;
Heeg, Tassilo ;
Schlom, Darrell ;
Datta, Suman .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2010, 57 (04) :742-748
[4]  
Amy F., 2005, SOLID STATE PHENOM, V103, P3
[5]  
Ando T., 2009, P EL DEV M IEDM 2009
[6]   Physical origins of mobility degradation in extremely scaled SiO2/HfO2 gate stacks with La and Al induced dipoles [J].
Ando, Takashi ;
Copel, Matt ;
Bruley, John ;
Frank, Martin M. ;
Watanabe, Heiji ;
Narayanan, Vijay .
APPLIED PHYSICS LETTERS, 2010, 96 (13)
[7]   Study of the defect elimination mechanisms in aspect ratio trapping Ge growth [J].
Bai, J. ;
Park, J. -S. ;
Cheng, Z. ;
Curtin, M. ;
Adekore, B. ;
Carroll, M. ;
Lochtefeld, A. ;
Dudley, M. .
APPLIED PHYSICS LETTERS, 2007, 90 (10)
[8]   The electrical properties of HfO2 dielectric on germanium and the substrate doping effect [J].
Bai, Weiping ;
Lu, Nan ;
Ritenour, Andrew P. ;
Lee, Minjoo Larry ;
Antoniadis, Dimitri A. ;
Kwong, Dim-Lee .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2006, 53 (10) :2551-2558
[9]   Si interlayer passivation on germanium MOS capacitors with high-κ dielectric and metal gate [J].
Bai, WP ;
Lu, N ;
Kwong, DL .
IEEE ELECTRON DEVICE LETTERS, 2005, 26 (06) :378-380
[10]  
Baldovino S., 2010, APPL PHYS LETT, V96