Highly sensitive infrared temperature sensor using self-heating compensated microbolometers

被引:55
作者
Ramakrishna, MVS
Karunasiri, G
Neuzil, P
Sridhar, U
Zeng, WJ
机构
[1] Natl Univ Singapore, Dept Elect Engn, Ctr Optoelect, Singapore 119260, Singapore
[2] Inst Microelect, Singapore 117685, Singapore
关键词
bolometer; thermometer; infrared; titanium; thermal conductance; self-heating; compensation;
D O I
10.1016/S0924-4247(99)00280-0
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper experimentally demonstrates a novel technique that drastically reduces the self-heating effect in microbolometers and which can be used to enhance the response due to infrared (IR). This is accomplished by using two bolometers with tailored thermal parameters, in particular, similar thermal mass but different thermal conductivity. Test devices with responsivity of over 6000 V/W at bias voltage of 3 V have been fabricated. Results indicate that this method is robust even under considerable mismatch of device parameters. We believe that this technique would pave way for realization of relatively simple, low cost and sensitive IR detectors for use in thermometry, imaging and other IR applications. (C) 2000 Elsevier Science S.A. All rights reserved.
引用
收藏
页码:122 / 127
页数:6
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