MEMS based polymeric H2S gas sensor for agricultural applications

被引：0

作者：

Vinchurkar, Madhuri ^{[1
]}

Patkar, Rajul ^{[1
]}

Ashwin, Mamta ^{[1
]}

Baghini, Maryam Shojaei ^{[1
]}

Rao, V. Ramgopal ^{[1
,2
]}

机构：

[1] Indian Inst Technol, Dept Elect Engn, Mumbai, Maharashtra, India

[2] Indian Inst Technol Delhi, Delhi, India

来源：

2020 IEEE INTERNATIONAL CONFERENCE ON FLEXIBLE AND PRINTABLE SENSORS AND SYSTEMS (IEEE FLEPS 2020) | 2020年

关键词：

Microcantilever; Piezoresistive; Polyethylene tetrapthalate (PET); gas sensor; PLATFORM;

D O I：

暂无

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In this work, we demonstrate the development of a Microlectromechanical system (MEMS) based, cleanroom free fabricated, piezoresistive hydrogen sulfide (H2S) gas sensor using a flexible polyethylene terephthalate (PET) substrate. This relatively cheap, simple to use, calibration-free sensor is highly sensitive, selective and operates at ambient conditions of temperature and humidity. This gas sensor would be ideal for agricultural applications where farmers are at risk for exposure to toxic gases, particularly H2S exposure in manure pits and livestock work.

引用

页数：5

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