PECVD of Hematite Nanoblades and Nanocolumns: Synthesis, Characterization, and Growth Model

被引：11

作者：

Carraro, Giorgio ^{[1
,2
]}

Gasparotto, Alberto ^{[1
,2
]}

Maccato, Chiara ^{[1
,2
]}

Bontempi, Elza ^{[5
]}

Barreca, Davide ^{[3
,4
]}

机构：

[1] Univ Padua, Dept Chem, Via Marzolo 1, I-35131 Padua, Italy

[2] INSTM, Via Marzolo 1, I-35131 Padua, Italy

[3] Univ Padua, IENI CNR, I-35131 Padua, Italy

[4] Univ Padua, INSTM, Dept Chem, I-35131 Padua, Italy

[5] Univ Brescia, Chem Technol Lab, I-25123 Brescia, Italy

来源：

CHEMICAL VAPOR DEPOSITION | 2015年 / 21卷 / 10-12期

关键词：

Fe(dpm)(3); Fe2O3; Low temperature growth; Orientation; PECVD; PHOTOELECTROCHEMICAL PROPERTIES; ALPHA-FE2O3; NANORODS; NANOSTRUCTURES; PERFORMANCE; FABRICATION; OXIDATION; INTERPLAY; OXIDE; IRON;

D O I：

10.1002/cvde.201507182

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

Fe2O3 nanostructures are fabricated on Si(100) and SiO2 by plasma enhanced (PE) CVD from a Fe-III beta-diketonate precursor. Depositions are carried out in Ar-O-2 plasmas, devoting particular attention to the influence of growth temperature (from 60 to 400 degrees C) on material chemico-physical properties. Remarkably, high purity, single-phase alpha-Fe2O3 nanostructures are obtained at temperatures as low as 60 degrees C. Furthermore, the deposit nano- organization can be tuned from < 110 >-oriented 2D nanoblade arrays to denser nanocolumns upon increasing the deposition temperature. A possible growth model is proposed to account for the observed structural/morphological features and light absorption properties of the target materials.

引用

页码：294 / 299

页数：6

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