共 30 条
[1]
Study of TiOxNy thin film selective surfaces produced by ion assisted deposition
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A,
1997, 15 (02)
:223-229
[5]
*INT CTR POWD DIFF, 2001, 722067 JCPDS PDF INT
[6]
*INT CTR POWD DIFF, 2001, 491283 JCPDS PDF INT
[8]
Correlation between structure, stress and deposition parameters in direct current sputtered zinc oxide films
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A,
2002, 20 (06)
:2084-2095