Optical and electrical properties of ITO thin films sputtered on flexible FEP substrate as passive thermal control system for space applications

被引：98
作者：
Sibin, K. P. [1 ,3 ]
Swain, Niharika [1 ]
Chowdhury, Prasanta [1 ]
Dey, Arjun [2 ]
Sridhara, N. [2 ]
Shashikala, H. D. [3 ]
Sharma, Anand Kumar [2 ]
Barshilia, Harish C. [1 ]
机构：
[1] Natl Aerosp Labs, CSIR, Surface Engn Div, Nanomat Res Lab, Bangalore 560017, Karnataka, India
[2] ISRO Satellite Ctr, Bangalore 560017, Karnataka, India
[3] Natl Inst Technol Karnataka, Dept Phys, Mangalore 575025, India
来源：
SOLAR ENERGY MATERIALS AND SOLAR CELLS | 2016年 / 145卷
关键词：
Flexible optical solar reflector; FEP substrate; Indium tin oxide (ITO); Sputtering; Emittance; Angular reflection; INDIUM-TIN-OXIDE; TRANSPARENT; TEMPERATURE; GLASS; THICKNESS; OXYGEN; DEPOSITION;
D O I：
10.1016/j.solmat.2015.10.035
中图分类号：
TE [石油、天然气工业]; TK [能源与动力工程];
学科分类号：
0807 ; 0820 ;
摘要：
ITO thin films were deposited on flexible fluorinated ethylene propylene (FEP) substrates by pulsed direct current reactive magnetron sputtering system using an In:Sn (90%-10% wt.) alloy target. The influence of the deposition parameters (argon and oxygen flow rates, and substrate temperature) and effect of coating thickness on the optical, electrical, structural and microstructural properties of ITO thin films deposited on PEP was investigated. The thickness of the ITO coatings was varied from 5 to 180 nm. The optimized ITO coating (10 nm thick) exhibited high IR emittance (79%) on FEP substrate with high average solar transmittance (94.0%) and moderate sheet resistance (3 k Omega/sq.). We also investigated in detail the angular dependence of reflectance as well as haze factor of thin ITO coatings. Our results suggest that 10 nm thick ITO coating exhibits an average haze factor of 8.6%. The high value of IR emittance, moderate sheet resistance and high solar transmittance along with low haze factor indicate the suitability of ITO thin films on PEP substrates as flexible optical solar reflector for space applications. (C) 2015 Elsevier B.V. All rights reserved.
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页码：314 / 322
页数：9
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