Comparative study on standard geometrical structures of cantilever-based MEMS piezoelectric energy harvester over T-shaped cantilever beam for low frequency ambient vibrations

The micro-generators can become an alternative to the battery-based solutions in the future, especially for remote systems. In this paper, we proposed a model and presented the simulation of a MEMS-based energy harvester of three different shapes piezoelectric cantilevers under ambient vibration excitation using the COVENTORWARE2010 approach. The designed T-shaped cantilever-based MEMS energy harvester that operates under ambient excitation frequency of 11 Hz within a base acceleration of 1g produces an output power of 2.4 mu w at 5k Omega load.