Temperature-dependent Monte Carlo simulations of thin metal film growth and percolation

被引:62
作者
Bruschi, P
Cagnoni, P
Nannini, A
机构
[1] Dipartimento di Ingegneria dellșInformazione: Elettronica Informatica, Telecomunicazioni Universit a degli Studi di Pisa
来源
PHYSICAL REVIEW B | 1997年 / 55卷 / 12期
关键词
D O I
10.1103/PhysRevB.55.7955
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A program for the simulation of the nucleation and growth of thin island films on amorphous substrates is presented. The program is based on the description of the phenomenon in terms of adsorption, diffusion, and reevaporation of single atoms on the substrate surface, which is represented as a triangular lattice of adsorption sites. A method of taking into account the interaction with neighboring particles in the evaluation of the diffusion activation barrier is proposed. The simulations are devoted to investigating the role of diffusion and reevaporation in the determination of the particular microstructure of the clusters. The effects of the substrate temperature on the morphology of the simulated island films are also presented. The cluster-size distribution and percolation threshold have been estimated and compared to experimental results available in the literature.
引用
收藏
页码:7955 / 7963
页数:9
相关论文
共 33 条
  • [1] ABRAHAM FF, 1970, J APPL PHYS, V41, P184
  • [2] CONDUCTION IN ANTIGRANULOCYTES METALS WITH POTENTIAL DISORDER
    ADKINS, CJ
    [J]. JOURNAL OF PHYSICS C-SOLID STATE PHYSICS, 1987, 20 (02): : 235 - 244
  • [3] DYNAMIC SCALING OF THE ISLAND-SIZE DISTRIBUTION AND PERCOLATION IN A MODEL OF SUBMONOLAYER MOLECULAR-BEAM EPITAXY
    AMAR, JG
    FAMILY, F
    LAM, PM
    [J]. PHYSICAL REVIEW B, 1994, 50 (12): : 8781 - 8797
  • [4] Kinetics of submonolayer and multilayer epitaxial growth
    Amar, JG
    Family, F
    [J]. THIN SOLID FILMS, 1996, 272 (02) : 208 - 222
  • [5] Nucleation behavior in molecular beam and chemical vapor deposition of silicon on Si(111)-(7x7)
    Andersohn, L
    Berke, T
    Kohler, U
    Voigtlander, B
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1996, 14 (02): : 312 - 318
  • [6] [Anonymous], 1983, Handbook of Thin Film Technology
  • [7] SCALING IN THE GROWTH OF AGGREGATES ON A SURFACE
    BEYSENS, D
    KNOBLER, CM
    SCHAFFAR, H
    [J]. PHYSICAL REVIEW B, 1990, 41 (14): : 9814 - 9818
  • [8] ANALYSIS OF ISLAND-SIZE DISTRIBUTIONS IN ULTRATHIN METALLIC-FILMS
    BLACKMAN, JA
    EVANS, BL
    MAAROOF, AI
    [J]. PHYSICAL REVIEW B, 1994, 49 (19): : 13863 - 13873
  • [9] TIME-DEPENDENT MONTE-CARLO STUDIES OF SURFACE-DIFFUSION
    BOWLER, AM
    HOOD, ES
    [J]. JOURNAL OF CHEMICAL PHYSICS, 1991, 94 (07) : 5162 - 5171
  • [10] Computer simulation of metal-on-metal epitaxy
    Breeman, M
    Barkema, GT
    Langelaar, MH
    Boerma, DO
    [J]. THIN SOLID FILMS, 1996, 272 (02) : 195 - 207