Thermal-oxidative growth of aligned W18O49 nanowire arrays for high performance gas sensor

被引:47
作者
Qin, Yuxiang [1 ]
Xie, Weiwei [1 ]
Liu, Yang [1 ]
Ye, Zhenhua [1 ]
机构
[1] Tianjin Univ, Sch Elect & Informat Engn, Tianjin 300072, Peoples R China
基金
中国国家自然科学基金;
关键词
Tungsten oxide; Gas sensor; Nanowire arrays; NO2; TUNGSTEN-OXIDE NANOWIRES; SENSING PROPERTIES; HIERARCHICAL STRUCTURE; WO3; METAL; ETHANOL; AREA; FILM;
D O I
10.1016/j.snb.2015.09.113
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
Gas sensors based on aligned arrays of W18O49 nanowires were formed directly via a novel route of in situ thermal oxidation of sputtered W film on the substrate attached patterned Pt electrodes. The well-developed nanowires have diameter of 10-20 nm and show roughly aligned morphology. It is found that the duration of oxygen exposure during thermal annealing plays a crucial role to harvest a pure phase of W18O49 nanowire with desired length. The roughly aligned W18O49 nanowires show favourable microstructure for gas adsorption and rapid gas diffusion. The NO2-sensing properties of aligned W18O49 nanowires sensor were evaluated at 50 degrees C up to 200 degrees C over NO2 concentration ranging from 250 ppb to 2.5 ppm. The results indicate that the W18O49 nanowire arrays sensor exhibits good NO2-sensing performances at its optimal operating temperature of 150 degrees C, especially perfect stability and fast response-recovery characteristics. The reliable interface performance and fast gas adsorption-desorption properties of the directly assembled vertically aligned nanowire array attribute to the superior stability and quick response/recovery. The growth mechanism of aligned W18O49 nanowires is proposed based on the direct SEM observations on the intermediate products, and meanwhile the sensing mechanism of the corresponding sensor is analyzed. (C) 2015 Elsevier By. All rights reserved.
引用
收藏
页码:487 / 495
页数:9
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