Elastic properties of organic thin film by acoustic microscopy

被引：0
|
作者：
Du, J [1 ]
Miyasaka, C [1 ]
Tittmann, BR [1 ]
机构：
[1] Penn State Univ, Dept Engn Sci & Mech, University Pk, PA 16802 USA
来源：
REVIEW OF PROGRESS IN QUANTITATIVE NONDESTRUCTIVE EVALUATION, VOLS 21A & B | 2002年 / 615卷
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D O I：
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中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
In this paper, an analytical acoustic microscopy V(z) model is developed for a two-layer system (organic thin film (low modulus) on thick substrate (high modulus)). The reflectance function is derived and V(z) curves are numerically simulated and experimentally obtained on thin films of different property and thickness. Through analyses of theoretical and experimental results and comparison between them, elastic properties of organic thin films can be separated from the substrate and calculated.
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页码：1193 / 1200
页数：8
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