Properties of hard magnetic Nd-Fe-B films versus different sputtering conditions

被引：20
作者：
Lileev, AS
Parilov, AA
Blatov, VG
机构：
[1] Technol Univ, Moscow State Inst Steel & Alloys, MISA, Moscow 119991, Russia
[2] Specialized Hysteresis Design Off, Moscow 121170, Russia
来源：
JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS | 2002年 / 242卷
关键词：
coercivity; thin films; hard magnetic materials;
D O I：
10.1016/S0304-8853(01)01269-0
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Hard magnetic Nd-Fe-B alloy films with thickness 50 60 mkm are received by ion plasma sputtering of Nd18Fe74B8 compound cast target in this investigation. In this investigation the interval of substrate temperatures and annealing temperatures when the crystal texture is forming with 'c' axes beyond the out of the film is determined. The influence of substrate material (Mo, Ni. Cu) on the formtion of texture direction and magnetic properties is studied. (C) 2002 Elsevier Science B.V. All rights reserved.
引用
收藏
页码：1300 / 1303
页数：4
相关论文
共 16 条
  • [1] (Nd,Tb)-Fe-B thin film magnets prepared by magnetron sputtering
    Araki, T
    Okabe, M
    [J]. NINTH ANNUAL INTERNATIONAL WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS, IEEE PROCEEDINGS: AN INVESTIGATION OF MICRO STRUCTURES, SENSORS, ACTUATORS, MACHINES AND SYSTEMS, 1996, : 244 - 249
  • [2] BELMANS R, 1998, P 6 INT C NEW ACT BR, P537
  • [3] MAGNETIC-PROPERTIES OF SPUTTERED ND-FE-B FILMS
    CADIEU, FJ
    CHEUNG, TD
    WICKRAMASEKARA, L
    [J]. JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, 1986, 54-7 (pt I) : 535 - 536
  • [4] HIGH IHC PERPENDICULAR ANISOTROPY ND-FE-B SPUTTERED FILMS
    CADIEU, FJ
    CHEUNG, TD
    WICKRAMASEKARA, L
    KAMPRATH, N
    [J]. IEEE TRANSACTIONS ON MAGNETICS, 1986, 22 (05) : 752 - 754
  • [5] Permanent magnet films for applications in microelectromechanical systems
    Chin, TS
    [J]. JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, 2000, 209 (1-3) : 75 - 79
  • [6] SPUTTERED PERMANENT ND-FE-B MAGNETS
    KAPITANOV, BA
    KORNILOV, NV
    LINETSKY, YL
    TSVETKOV, VY
    [J]. JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, 1993, 127 (03) : 289 - 297
  • [7] KLOPZIG M, 1998, P 6 INT C NEW ACT BR, P548
  • [8] MICRO PATTERNING OF THIN ND-FE-B FILMS
    LEMKE, H
    LANG, T
    GODDENHENRICH, T
    HEIDEN, C
    [J]. JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, 1995, 148 (03) : 426 - 432
  • [9] LILEEV AS, 2000, 8 INT C PERM MAGN SU, P135
  • [10] THE EFFECT OF SHAPE ANISOTROPY ON THE SPIN REORIENTATION IN ND2FE14B FILMS
    PANAGIOTOPOULOS, I
    NICOLAIDES, GK
    PSYCHARIS, V
    NIARCHOS, D
    [J]. JOURNAL OF ALLOYS AND COMPOUNDS, 1994, 205 (1-2) : 45 - 47
12