[1] Univ Freiburg, IMTEK Dept Microsyst Engn, Lab MEMS Applicat, Georges Koehler Allee 103, D-79110 Freiburg, Germany
[2] Hahn Schickard, Wilhelm Schickard Str 10, D-78052 Villingen, Germany
[3] Fraunhofer Inst Solar Energy Syst, Heidenhofstr 2, D-79110 Freiburg, Germany
[4] Univ Freiburg, FIT, Georges Koehler Allee 105, D-79110 Freiburg, Germany