Reliability of RF MEMS Capacitive and Ohmic Switches for Space Redundancy Configurations

被引：0
|
作者：
Lucibello, Andrea [1 ]
Marcelli, Romolo [1 ]
Proietti, Emanuela [1 ]
Bartolucci, Giancarlo [1 ,2 ]
Mulloni, Viviana [3 ]
Margesin, Benno [3 ]
机构：
[1] CNR IMM Roma, Via Fosso del Cavaliere 100, I-00133 Rome, Italy
[2] Univ Roma Tor Vergata, Dept Elect Engn, I-00133 Rome, Italy
[3] Fdn B Kessler, I-38123 Trento, Italy
来源：
2013 SYMPOSIUM ON DESIGN, TEST, INTEGRATION AND PACKAGING OF MEMS/MOEMS (DTIP) | 2013年
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D O I：
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中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper RF MEMS switches in coplanar waveguide (CPW) configuration designed for redundancy space applications have been analyzed, to demonstrate their reliability in terms of microwave performances when subjected to DC actuations up to one million cycles. As a result, both the investigated structures fulfill the current electrical requirements expected for redundancy logic purposes.
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页数：6
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