Final report of key comparison CCM.P-K12 for very low helium flow rates (leak rates)

被引：6

作者：

Jousten, K. ^{[1
]}

Arai, K. ^{[2
]}

Becker, U. ^{[1
]}

Bodnar, O. ^{[1
]}

Boineau, F. ^{[3
]}

Fedchak, J. A. ^{[4
]}

Gorobey, V. ^{[5
]}

Jian, Wu ^{[6
]}

Mari, D. ^{[7
]}

Mohan, P. ^{[8
]}

Setina, J. ^{[9
]}

Toman, B. ^{[4
]}

Vicar, M. ^{[10
]}

Yan, Yu Hong ^{[11
]}

机构：

[1] PTB, D-10587 Berlin, Germany

[2] AIST, NMIJ, Tsukuba, Ibaraki 3058563, Japan

[3] Lab Natl Metrol & Essais LNE, F-75724 Paris 15, France

[4] NIST, Gaithersburg, MD 20899 USA

[5] DI Mendeleyev Inst VNIIM, St Petersburg 190005, Russia

[6] ASTAR, Natl Metrol Ctr 2 27, Singapore 118221, Singapore

[7] Ist Nazl Ric Metrol INRIM, I-10135 Turin, Italy

[8] CSIR Natl Phys Lab India NPL, New Delhi 110012, India

[9] IMT, Ljubljana 1000, Slovenia

[10] CMI, Brno 63800, Czech Republic

[11] NIM, Vacuum Lab Heat Div, Beijing 100013, Peoples R China

来源：

METROLOGIA | 2013年 / 50卷

关键词：

VACUUM; CALIBRATION; FLOWMETER;

D O I：

10.1088/0026-1394/50/1A/07001

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Quantitative leak tests with vacuum technology have become an important tool in industry for safety and operational reasons and to meet environmental regulations. In lack of a relevant key comparison, so far, there are no calibration measurement capabilities published in the BIPM data base. To enable national metrology institutes providing service for leak rate calibrations to apply for these entries in the data base and to ensure international equivalence in this field, key comparison CCM.P-K12 was organised. The goal of this comparison was to compare the national calibration standards and procedures for helium leak rates. Two helium permeation leak elements of 4.10(-11) mol/s (L1) and 8.10(-14) mol/s (L2) served as transfer standards and were measured by 11 national metrology institutes for L1 and 6 national metrology institutes for L2. Equivalence could be shown for 8 laboratories in the case of L1 and for all 6 in the case of L2. Three different evaluation methods were applied and are presented in this report, but the random effects model was accepted as most suitable in our case.

引用

页数：50

共 22 条

[1]

Arai Kenta, 2010, Journal of the Vacuum Society of Japan, V53, P614, DOI 10.3131/jvsj2.53.614

[2]

Bodnar O, 2012, IN PRESS

[3] The IMGC-CNR flowmeter for automatic measurements of low-range gas flows [J].