Investigation on the Low Cost 2ωYLF Laser Crystallization Poly-silicon Technology

被引：0
|
作者：
Yin, Chunjian [1 ]
Li, Juan [1 ]
Ye, Chengzhi [1 ]
Liu, Ning [1 ]
Xiong, Shaozhen [1 ]
机构：
[1] Nankai Univ, Inst Photoelect, Tianjin 300071, Peoples R China
来源：
PROCEEDINGS OF CHINA DISPLAY/ASIA DISPLAY 2011 | 2011年
关键词：
2 omega YLF laser crystallization; poly-silicon; sequential lateral solidification; AMOLED;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The 2 omega YLF laser crystallization technology with a low cost has been investigated in this paper. We have designed and established a 2 omega YLF laser crystallization system by ourselves. The YLF laser has been used as the laser source. Then, the influences of the 2 omega YLF laser crystallization parameters on the performances of the resulted poly-Si have been studied. Based on the optimization of the 2 omega YLF laser crystallization condition, the sequential lateral solidification (SLS) has been achieved. The grain size is several micron meters.
引用
收藏
页码：683 / 686
页数：4
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