Evaluation of theoretical models for elastic electron backscattering from surfaces

被引：61
作者：
Dubus, A
Jablonski, A
Tougaard, S
机构：
[1] Free Univ Brussels, Serv Metrol Nucl CP165 84, B-1050 Brussels, Belgium
[2] Polish Acad Sci, Inst Phys Chem, PL-01224 Warsaw, Poland
[3] Univ So Denmark, Dept Phys, DK-5230 Odense, Denmark
来源：
PROGRESS IN SURFACE SCIENCE | 2000年 / 63卷 / 06期
关键词：
D O I：
10.1016/S0079-6816(99)00018-0
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
In recent years, there has been an increasing interest in the elastic electron backscattering phenomenon partly due to its use in experimental determination of inelastic electron mean-free-paths. A critical review is presented of the current status of theoretical models to describe this phenomenon. Particular stress is put on determination of the accuracy and ranee of validity of various analytical models by comparison to extensive Monte Carlo simulations. (C) 2000 Published by Elsevier Science Ltd. All rights reserved.
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收藏
页码：135 / 175
页数：41
相关论文
共 92 条
[81]  
Tanuma S, 1997, SURF INTERFACE ANAL, V25, P25, DOI 10.1002/(SICI)1096-9918(199701)25:1<25::AID-SIA207>3.0.CO
[82]  
2-2
[83]   ESCAPE PROBABILITY OF AUGER ELECTRONS FROM NONCRYSTALLINE SOLIDS - EXACT SOLUTION IN THE TRANSPORT APPROXIMATION [J].
TILININ, IS ;
WERNER, WSM .
PHYSICAL REVIEW B, 1992, 46 (21) :13739-13746
[84]   ELASTIC AND INELASTIC-SCATTERING OF ELECTRONS REFLECTED FROM SOLIDS - EFFECTS ON ENERGY-SPECTRA [J].
TOFTERUP, AL .
PHYSICAL REVIEW B, 1985, 32 (05) :2808-2818
[85]   Contribution to the study of elastic electron backscattering from polycrystalline metallic targets by Monte Carlo simulation [J].
Tombuyses, B ;
Dubus, A .
MATHEMATICS AND COMPUTERS IN SIMULATION, 1998, 47 (2-5) :483-491
[86]   INELASTIC-ELECTRON-SCATTERING CROSS-SECTIONS FOR SI, CU, AG, AU, TI, FE, AND PD [J].
TOUGAARD, S ;
KRAAER, J .
PHYSICAL REVIEW B, 1991, 43 (02) :1651-1661
[87]  
TOUGAARD S, 1982, PHYS REV B, V25, P4452, DOI 10.1103/PhysRevB.25.4452
[88]   LOW-LOSS IMAGE FOR SURFACE SCANNING ELECTRON MICROSCOPE [J].
WELLS, OC .
APPLIED PHYSICS LETTERS, 1971, 19 (07) :232-&
[89]   ANGULAR-DISTRIBUTION OF ELECTRONS REFLECTED ELASTICALLY FROM NONCRYSTALLINE SOLID-SURFACES [J].
WERNER, WSM ;
TILININ, IS ;
HAYEK, M .
PHYSICAL REVIEW B, 1994, 50 (07) :4819-4833
[90]   THE ESCAPE PROBABILITY OF AUGER AND PHOTOELECTRONS FROM SOLIDS [J].
WERNER, WSM ;
TILININ, IS .
APPLIED SURFACE SCIENCE, 1993, 70-1 (1 -4 pt A) :29-34
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