Synthesis and Applications of Two-Dimensional Hexagonal Boron Nitride in Electronics Manufacturing

被引:51
作者
Bao, Jie [1 ,2 ,3 ]
Jeppson, Kjell [1 ,2 ,4 ]
Edwards, Michael [4 ]
Fu, Yifeng [4 ,5 ]
Ye, Lilei [5 ]
Lu, Xiuzhen [1 ,2 ]
Liu, Johan [1 ,2 ,4 ]
机构
[1] Shanghai Univ, Sch Automat & Mech Engn, SMIT Ctr, Shanghai 200072, Peoples R China
[2] Shanghai Univ, Key State Lab New Displays & Syst Applicat, Shanghai 200072, Peoples R China
[3] Huangshan Univ, Sch Mech & Elect Engn, Huangshan 245041, Peoples R China
[4] Chalmers Univ Technol, Dept Microtechnol & Nanosci, S-41296 Gothenburg, Sweden
[5] SHT Smart High Tech AB, S-41133 Gothenburg, Sweden
基金
中国国家自然科学基金;
关键词
two-dimensional hexagonal boron nitride; electronics manufacturing; van der waals heterostructures; VAPOR-DEPOSITION GROWTH; LARGE-SCALE EXFOLIATION; THERMAL-CONDUCTIVITY; PHONON TRANSPORT; GRAPHENE FILMS; LAYER GRAPHENE; ATOMIC LAYERS; WAFER-SCALE; H-BN; NANOSHEETS;
D O I
10.1007/s13391-015-5308-2
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In similarity to graphene, two-dimensional (2D) hexagonal boron nitride (hBN) has some remarkable properties, such as mechanical robustness and high thermal conductivity. In addition, hBN has superb chemical stability and it is electrically insulating. 2D hBN has been considered a promising material for many applications in electronics, including 2D hBN based substrates, gate dielectrics for graphene transistors and interconnects, and electronic packaging insulators. This paper reviews the synthesis, transfer and fabrication of 2D hBN films, hBN based composites and hBN-based van der Waals heterostructures. In particular, this review focuses on applications in manufacturing electronic devices where the insulating and thermal properties of hBN can potentially be exploited. 2D hBN and related composite systems are emerging as new and industrially important materials, which could address many challenges in future complex electronics devices and systems.
引用
收藏
页码:1 / 16
页数:16
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